Rotation Rate Sensor Linear Oscillation Coriolis Signal
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Conventional micromechanical rotation rate sensors suffer from weak signals and imprecise evaluations due to partial mass deflection by Coriolis force, requiring complex detection and evaluation of tilting movements, which limits their accuracy and precision.
Innovation Solution
The rotation rate sensor employs a linearly aligned oscillatory motion, allowing the entire mass to be deflectable by Coriolis force, resulting in a larger signal and simplifying detection through in-plane motion, with electrostatic, magnetic, or piezoelectric drives, and optimized electrode configurations to enhance signal-to-background ratio and reduce size.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the mass is driven into oscillatory motion about a first axis of rotation, then the rotation rate sensor can detect rotary motion, but only a portion of the mass is deflected by the Coriolis force resulting in a weak signal
Solution Approach 1:
The patent transitions from detecting tilting movements (3D rotational motion) to detecting linear displacement movements (1D linear motion) in the chip plane. By aligning the axis of oscillation perpendicular to the chip plane and detecting linear displacement parallel to the chip plane, the invention simplifies the detection geometry while maximizing Coriolis force utilization.
Solution Approach 2:
The patent changes the orientation parameter of the oscillation axis from being in the chip plane to being perpendicular to the chip plane. This parameter change enables the entire mass to be deflected by the Coriolis force while allowing detection of linear displacement in the chip plane, thereby strengthening the signal.
2Measurement precision
If the axis of oscillation is aligned perpendicular to the interior surface, then the linear oscillatory motion results in out-of-phase driving out of the chip plane, but the gap clearances in the chip plane become insufficient
Solution Approach 1:
The patent utilizes the third dimension (perpendicular to the chip plane) for the oscillation axis, which allows the Coriolis force to produce detectable linear displacement in the chip plane without requiring large gap clearances. The out-of-plane oscillation combined with in-plane detection optimizes both signal quality and spatial constraints.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach provides a more precise and cost-effective rotation rate sensing with reduced size, improved signal quality, and simplified detection, suitable for various applications including motor vehicles and image stabilization.
Implementation Method 1
the drive includes at least one drive electrode mounted on the first drive frame, at least one counter electrode fixedly disposed relative to the mounting support, and a control device, which is designed to apply a drive voltage between the at least one drive electrode and the at least one counter electrode
Implementation Method 2
electrostatic, magnetic, or piezoelectric drives
Implementation Method 3
electrostatic, magnetic, or piezoelectric drives
Implementation Method 4
in a rotary motion of the rotation rate sensor, a Coriolis force causes a linear deflection in at least one first deflection direction
Data Source
AI summary
A rotation rate sensor includes: a mounting device; a first drive frame having a drive, which is designed to set the first drive frame into a first oscillatory motion along an axis of oscillation relative to the mounting device; a first stator electrode; a first actuator electrode coupled to the first drive frame in such a way that in a rotary motion of the rotation rate sensor due to a Coriolis force, the first actuator electrode being displaceable in a first deflection direction relative to the first stator electrode; and an evaluation device configured to determine a voltage applied between the first stator electrode and the first actuator electrode, and to specify information regarding the rotary motion of the rotation rate sensor while taking the determined voltage value into account.