Rotation Rate Sensor Multi-Directional Detection
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Solution Overview
Problem
Existing rotation rate sensors are inadequate for measuring rotation rates applied in the main extension direction of the substrate, as they are primarily designed to detect rates perpendicular to the surface, resulting in insufficient measurement capabilities in this direction.
Innovation Solution
The rotation rate sensor employs a mechanical connection using first and second spring components, configured as part of an additional layer, to provide a soft suspension in the perpendicular direction and high stiffness in the main extension plane, allowing for precise detection of rotation rates applied in the main extension direction. These spring components are designed to be thin and soft in the perpendicular direction, yet stiff in the main extension directions, preventing tilting and enabling effective measurement.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If springs are configured as part of the thick polysilicon functional layer, then the sensor can detect rotation rates perpendicular to the substrate surface, but the measurement capability in the main extension direction is insufficient
Solution Approach 1:
The patent introduces a new dimensional approach by adding spring components that extend in the main extension direction of the substrate, complementing the existing vertical spring configuration. This creates a three-dimensional suspension system where springs operate both perpendicular to the substrate and within the main extension plane, enabling detection capability in multiple directions simultaneously.
Solution Approach 2:
The spring system is segmented into different functional components: vertical springs for perpendicular rotation detection and additional spring components within the thick polysilicon layer for in-plane rotation detection. This segmentation allows each spring component to be optimized for its specific directional function while working together to provide comprehensive multi-directional measurement capability.
2Volume of moving object
If the sensor structure is made narrow to enable parallel movement, then the sensor becomes space-saving, but the stiffness in the main extension direction is reduced
Solution Approach 1:
The patent employs composite structural elements within the thick polysilicon functional layer, combining different material properties and structural configurations to achieve the desired mechanical characteristics. The spring components are designed with specific geometries and material compositions that provide both the necessary flexibility for movement and the required stiffness for accurate measurement in the main extension direction.
Solution Approach 2:
Different regions of the sensor structure are assigned different mechanical properties. The spring components within the thick polysilicon layer are locally optimized with specific thicknesses, widths, and geometries that provide high stiffness in the main extension direction while maintaining the overall compact footprint of the sensor.
3Measurement precision
If additional spring components are added to the thick polysilicon layer, then measurement precision in the main extension direction improves, but device complexity increases
Solution Approach 1:
The additional spring components within the thick polysilicon functional layer serve multiple functions: they provide mechanical suspension for the detection frame, enable detection of rotation rates in the main extension direction, and work cooperatively with the vertical springs to provide multi-directional measurement capability. This multi-functionality reduces the need for separate dedicated components for each function.
Solution Approach 2:
The patent merges the spring components with the thick polysilicon functional layer, integrating the suspension mechanism into the existing structural layer rather than adding completely separate components. This merging approach reduces overall device complexity by combining multiple functions within a unified structural framework while maintaining the enhanced measurement precision.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enables high-precision detection of rotation rates in the main extension direction while maintaining a space-saving design, effectively addressing the limitations of existing sensors by providing enhanced measurement capabilities and preventing structural tilting.
Implementation Method 1
a mechanical connection between the Coriolis structure and the drive structure is established with the aid of a first spring component, the first spring component being configured as a part of the additional layer, and/or that a mechanical connection between the detection structure and the substrate is established with the aid of a second spring component, the second spring component being configured as a part of the additional layer
Data Source
AI summary
A rotation rate sensor including a substrate, a drive structure, which is movable with regard to the substrate, a detection structure, and a Coriolis structure, the drive structure, the Coriolis structure, and the detection structure being essentially situated in a layer, in that an additional layer is situated essentially in parallel to the layer above or underneath the layer, a mechanical connection between the Coriolis structure and the drive structure being established with a first spring component, the first spring component being configured as a part of the additional layer, and/or a mechanical connection between the detection structure and the substrate being established with a second spring component, the second spring component being configured as a part of the additional layer.