Vibration-Resistant Rotation Rate Sensor with Acceleration Compensation
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Solution Overview
Problem
Existing rotation rate sensors are highly sensitive to external interferences such as accelerations, which affect their functionality and measuring accuracy.
Innovation Solution
The rotation rate sensor is designed with seismic masses that are configured to minimize sensitivity to external interferences by compensating for linear, rotational, and centrifugal accelerations across multiple axes, using a detection device with structures like comb electrodes or piezoresistive structures to generate detection signals for accurate rotation rate measurement.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If conventional rotation rate sensor design is used, then the sensor can detect rotation rate, but the sensor has high sensitivity to external interferences such as linear accelerations and rotational accelerations
Solution Approach 1:
The sensor divides the detection function into multiple independent seismic masses (at least four), each detecting acceleration components in specific directions. By segmenting the measurement into multiple orthogonal components and processing them differently, the sensor can separate rotation rate signals from interference signals.
Solution Approach 2:
The patent applies asymmetric arrangement and driving of seismic masses to create differential measurement modes. By asymmetrically positioning and driving the seismic masses, the sensor generates different response patterns for rotation rate versus linear/rotational accelerations, enabling signal discrimination through evaluation of the detection signals.
2Reliability
If the sensor compensates for multiple acceleration components (linear, rotational, centrifugal) across multiple axes, then vibration resistance improves, but device complexity increases
Solution Approach 1:
Each seismic mass serves multiple functions: detecting linear acceleration components, rotational acceleration components, and centrifugal acceleration components simultaneously. The same detection device structure is used for all seismic masses, and the evaluation device processes all acceleration components through a unified compensation algorithm, achieving multi-functionality without proportional increase in complexity.
Solution Approach 2:
The patent combines multiple detection functions into a single integrated sensor structure. The detection device simultaneously measures multiple acceleration components using the same basic detection technology (comb electrodes, plate electrodes, piezoelectric structures, etc.), and the evaluation device merges all detection signals to compute rotation rate while compensating for all interference components in one processing step.
3Measurement precision
If multiple seismic masses are used to compensate for accelerations, then measuring accuracy improves, but the number of detection elements and device complexity increase
Solution Approach 1:
The sensor segments the detection task across multiple seismic masses, with each mass equipped with detection elements for specific deflection directions. This segmentation allows the system to measure multiple acceleration components in parallel, improving accuracy while keeping each individual detection element relatively simple.
Solution Approach 2:
The patent extends the detection from single-axis to multi-axis by adding seismic masses that detect acceleration components in different spatial dimensions. Each additional seismic mass adds detection capability in new directions (x, y, z axes and their combinations), enabling comprehensive acceleration compensation through spatial dimensionality rather than increasing complexity in a single dimension.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design enhances the sensor's vibration resistance and measuring accuracy, allowing reliable operation even under pronounced external interferences by effectively compensating for various acceleration components, thereby reducing susceptibility to external interferences.
Implementation Method 1
Each seismic mass may be deflected as a function of an acceleration along one or both of its respective deflection directions, the acceleration including a Coriolis acceleration, linear acceleration, rotational acceleration, centrifugal acceleration
Implementation Method 2
the detection device has, in particular, a comb electrode structure, a plate electrode structure, a piezoelectric structure, a piezoresistive structure, an electromagnetic structure, a magnetostrictive structure and/or an optical structure
Implementation Method 3
the detection device has, in particular, a comb electrode structure, a plate electrode structure, a piezoelectric structure, a piezoresistive structure, an electromagnetic structure, a magnetostrictive structure and/or an optical structure
Data Source
AI summary
A rotation rate sensor includes a substrate having a main extension plane and multiple seismic masses, in which for each seismic mass the following applies: the seismic mass is drivable at a drive oscillation, which occurs along a drive direction situated parallel to the main extension plane, the seismic mass is deflectable along two different deflection directions, each direction being perpendicular to the drive direction, the rotation rate sensor being configured to generate detection signals as a function of detected deflections of the seismic masses, one detection signal of the detection signals being associated with each deflection direction of the seismic masses, the rotation rate sensor being configured so that a linear, rotational and centrifugal acceleration of the rotation rate sensor are compensated with respect to at least one rotation axis of the rotation rate sensor through compensation in each case of two corresponding detection signals of the detection signals.