Rotational Carrier Interface for Compact Semiconductor Transfer

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Solution Overview

Problem

Current semiconductor carrier transfer systems face challenges in reducing the weight and installation costs of semiconductor carrier interfaces, while also enhancing transfer speed and capacity, and efficiently managing the installation process.

Innovation Solution

A rotational interface system comprising a base column, rotary unit, and carrier plate with storage pots and fixing pins, integrated with a carrier transfer system that includes travel rails and an overhead hoist transport, allowing for efficient alignment and loading of semiconductor carriers, reducing interference and optimizing space usage.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Weight of moving object

If a conventional semiconductor carrier interface is used, then the structure is simple and easy to manufacture, but the weight is heavy and occupies large area

Engineering Contradiction:
Improveweight of semiconductor carrier interfaceVSAvoidstructural complexity of rotational interface
Core Design Contradiction:
Weight of moving objectVSDevice complexity

Solution Approach 1:

The interface system is divided into separate functional modules: a rotary unit for rotation, a carrier plate for carrying carriers, and a base column for support. This segmentation allows each component to be optimized independently, reducing overall weight while maintaining structural integrity through modular design.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The interface transitions from a conventional fixed horizontal structure to a vertical rotating structure. The carrier plate rotates vertically around the base column, changing the spatial dimension of operation from horizontal to vertical, which reduces the occupied floor area while maintaining transfer capability.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Productivity

If transfer speed is increased to improve productivity, then manufacturing efficiency improves, but system complexity and installation costs increase

Engineering Contradiction:
Improvetransfer speed of semiconductor carrierVSAvoidcomplexity of transfer system
Core Design Contradiction:
ProductivityVSDevice complexity

Solution Approach 1:

The system employs a dynamic rotary unit that can rotate the carrier plate to different positions, enabling flexible and rapid carrier transfer. This dynamic rotation mechanism allows the system to adapt to different transfer speeds and positions, improving productivity without requiring multiple fixed transfer stations.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The rotary unit serves multiple functions: it rotates the carrier plate for transfer, positions carriers at different heights, and enables both loading and unloading operations from a single interface structure. This multi-functionality reduces the need for separate dedicated mechanisms for each operation, controlling system complexity while improving transfer speed.

Inventive Principle:
Principle #6Universality (Multi-functionality)

3Area of stationary object

If the occupied area is reduced to optimize space usage, then facility space efficiency improves, but installation complexity increases

Engineering Contradiction:
Improveoccupied area of carrier interfaceVSAvoidease of installation of rotational interface
Core Design Contradiction:
Area of stationary objectVSEase of manufacture

Solution Approach 1:

The interface system transitions from a horizontal layout to a vertical configuration, with the carrier plate rotating around a vertical base column. This vertical arrangement充分利用s the vertical space, reducing the horizontal footprint while maintaining all necessary transfer functions through rotational movement.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The rotational interface is divided into modular components (base column, rotary unit, carrier plate) that can be manufactured separately and assembled. This segmentation simplifies the installation process despite the compact vertical design, as each module can be pre-assembled and tested before final integration.

Inventive Principle:
Principle #1Segmentation

Data Source

PatentUS20240332053A1Rotational interface, carrier transfer system including the same, and semiconductor manufacturing method using the same
Publication Date: 2024.10.03 SAMSUNG ELECTRONICS CO LTD
  • US20240332053A1 patent drawing
  • US20240332053A1 patent drawing
  • US20240332053A1 patent drawing

AI summary

A rotational interface includes a base column extending in a first direction, a rotary unit, and a carrier plate extending from the base column in a second direction and connected to the rotary unit, the carrier plate includes a plate body extending in the second direction and coupled to the base column, and a storage pot disposed on the plate body and having an upper surface, and the storage pot includes a fixing pin located on the upper surface of the storage pot and that fixes a semiconductor carrier to the plate body.