Rotational Drive Network Layout for Stable Multi-Rotator Control

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Solution Overview

Problem

Existing rotational drive devices for substrate processing apparatuses face communication failures and reduced maintainability due to complex signal and power line configurations, which can lead to instability and inefficiencies in the rotation and control of multiple rotators.

Innovation Solution

A rotational drive device with a network-connected driver system that uses non-contact slip rings to transmit signals and power, reducing the number of lines and contacts between the stator and rotators, thereby improving communication stability and maintainability.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If complex signal and power line configurations are used to connect drivers to multiple rotators, then control capability is improved, but communication stability and maintainability deteriorate

Engineering Contradiction:

Improvecontrol capabilityVSAvoidcommunication stability

Core Design Contradiction:

Adaptability or versatilityVSReliability

Solution Approach 1:

The patent replaces mechanical electrical connections (slip rings with contact lines) with a wireless communication system. Drivers mounted on rotators communicate with the controller via wireless signals, eliminating physical contact lines that cause communication failures. This substitution maintains full control capability over multiple rotators while dramatically improving communication stability by removing the mechanical contact interface.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent extracts and removes the complex network of signal and power lines from the rotational drive system. By taking out these physical connections entirely and replacing them with wireless communication, the system eliminates the source of communication failures and crosstalk, thereby improving reliability while preserving control functionality through the wireless network.

Inventive Principle:

Principle #2Taking out (Extraction)

2Adaptability or versatility

If complex signal and power line configurations are used to connect drivers to multiple rotators, then control capability is improved, but device complexity increases

Engineering Contradiction:

Improvecontrol capabilityVSAvoidline configuration complexity

Core Design Contradiction:

Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The patent replaces the complex mechanical system of sliding contacts, signal lines, and power lines with a wireless communication system. This substitution eliminates the intricate line configurations required to connect multiple drivers to rotators, significantly reducing device complexity while maintaining full control capability through wireless signal transmission.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent changes the fundamental parameter of connection method from physical contact-based electrical connections to wireless electromagnetic communication. This parameter change transforms the system from requiring complex routed lines to using simple wireless signal transmission, thereby reducing device complexity while preserving adaptability and control capability.

Inventive Principle:

Principle #35Parameter changes

3Use of energy by moving object

If multiple contact lines are used between stator and rotators, then power and signal transmission is achieved, but crosstalk and communication failures occur

Engineering Contradiction:

Improvepower transmissionVSAvoidcrosstalk

Core Design Contradiction:

Use of energy by moving objectVSObject-generated harmful factors

Solution Approach 1:

The patent replaces the mechanical electrical contact system with wireless communication technology. This substitution eliminates the physical proximity of multiple contact lines that causes electromagnetic crosstalk, while still achieving efficient power and signal transmission. The wireless medium naturally isolates communication channels, preventing the crosstalk problems inherent in dense line configurations.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent introduces wireless electromagnetic waves as an intermediary medium for power and signal transmission between the stator and rotators. This intermediary replaces direct physical contact lines, providing natural electrical isolation that prevents crosstalk while maintaining transmission efficiency. The wireless intermediary eliminates the harmful electromagnetic interference that occurs when multiple lines are in close physical proximity.

Inventive Principle:

Principle #24Intermediary (Mediator)

Data Source

PatentUS11885003B2Rotational drive device, substrate processing apparatus, and rotational driving method

Publication Date: 2024.01.30 TOKYO ELECTRON LTD

AI summary

A rotational drive device includes a first rotator configured to rotate with respect to a stator, a plurality of second rotators configured to rotate with respect to the first rotator, a plurality of drivers configured to rotatably drive the respective second rotators, and a plurality of driver controllers configured to rotate integrally with the first rotator and to control rotation of the drivers, respectively, the respective driver controllers being connected to one another by a communication network.