Rotational Flow Generator for Pipe Clogging Prevention
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Solution Overview
Problem
Conventional methods for preventing clogging in pipe members, such as those in semiconductor manufacturing apparatuses, often fail to maintain high temperatures or effective flow velocities, leading to adhesion and deposition of by-products on inner walls, resulting in clogging and maintenance issues.
Innovation Solution
A rotational flow generator is attached to pipe members, featuring a jetting port that injects a second fluid at an angle to create a rotational flow, disrupting the boundary layer and preventing adhesion of by-products by enhancing flow velocity and temperature distribution along the inner wall.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If a sheet heater is wound around the pipe member to heat it, then the adhesion of by-products is reduced, but the temperature cannot be raised sufficiently to prevent clogging
Solution Approach 1:
The invention uses a rotational flow generator that creates high-velocity fluid flow through the pipe member to prevent clogging. The rotational flow generates shear stress and turbulence that mechanically removes adhered substances from the pipe inner wall, replacing thermal heating with hydraulic/pneumatic action for clogging prevention.
Solution Approach 2:
The invention introduces a dynamic rotational flow field into the pipe system. The flow generator creates continuously moving rotational currents that dynamically interact with the pipe inner wall, providing ongoing mechanical cleaning action rather than static heating, thereby preventing deposit accumulation through motion-induced shear forces.
2Productivity
If a high-temperature dilution gas flows into the pipe member, then by-products are decomposed, but the flow velocity on the inner wall becomes slow and temperature decreases, causing clogging
Solution Approach 1:
The rotational flow generator creates a dynamic high-velocity flow field that maintains elevated flow velocities along the pipe inner wall. The rotational motion generates centrifugal forces and shear stresses that prevent boundary layer formation, ensuring continuous high-speed flow contact with the wall surface to prevent deposit accumulation.
Solution Approach 2:
The rotational flow induces mechanical disturbances and turbulence in the fluid stream. These oscillating flow patterns create varying shear stresses on the pipe inner wall, preventing stagnant zones and promoting continuous removal of adhered substances through mechanical disruption of the boundary layer.
3Reliability
If a rotational flow is generated in the pipe using a guide blade, then adhered substances are reduced, but deposits occur on the inner wall after long-term use
Solution Approach 1:
The rotational flow generator is positioned upstream to create rotational flow before the fluid reaches sections prone to deposit accumulation. This preliminary action establishes a self-cleaning flow pattern throughout the pipe system that continuously prevents deposit formation rather than merely removing existing deposits, extending the interval between maintenance operations.
Solution Approach 2:
The invention changes the flow parameters by introducing rotational motion and associated shear stresses. This parameter change transforms the flow regime from laminar or low-turbulence flow to high-turbulence rotational flow, fundamentally altering the fluid's interaction with the pipe wall to prevent long-term deposit accumulation through enhanced mixing and shear-induced removal.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The rotational flow generator effectively prevents clogging by maintaining flow velocity and temperature, reducing the frequency of maintenance and improving operational efficiency in semiconductor manufacturing and other piping systems.
Implementation Method 1
generates a rotational flow in a pipe
Implementation Method 2
disrupting the boundary layer and preventing adhesion of by-products
Data Source
AI summary
Provided are a rotational flow generator, a piping system, a semiconductor manufacturing apparatus, and a heat exchanger that enable the clogging of a pipe member to be more effectively prevented. A rotational flow generator 1 comprises a spray port 14a that can be attached to/removed from a pipe member 103 through which a first fluid flows, and that sprays a second fluid in a direction inclined with respect to the center axis line of the pipe member 103. A rotational flow generated by the rotational flow generator 1 can reduce the amount of accretion on an inner wall of the pipe member 103.