Rotor Scanner Optical Writing Apparatus for High-Throughput Patterning
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Solution Overview
Problem
Conventional pattern generation systems for large workpieces face challenges in achieving high throughput, high resolution, and minimizing errors such as 'Mura' defects, due to limitations in mechanical and optical systems that result in visible artifacts and increased complexity and cost.
Innovation Solution
The implementation of a rotor scanner with multiple optical writing units arranged on a rotating disc or ring, emitting beams radially and capable of rotational and translational movement, along with a calibration system to adjust parameters like focus, position, and power, to create high-resolution patterns with reduced 'Mura' effects.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If conventional pattern generation systems use single writing units with limited movement capabilities, then device complexity is reduced, but throughput and manufacturing precision deteriorate due to visible artifacts and inability to achieve required error control
Solution Approach 1:
The system divides the workpiece into multiple zones and uses multiple writing units positioned at different radial locations on the rotating drum. Each writing unit independently patterns its designated zone, enabling parallel processing and high throughput while maintaining simplicity through modular architecture
Solution Approach 2:
The system transitions from conventional linear scanning to rotational scanning in a different dimensional approach. The drum rotates to provide scanning motion while writing units move axially, creating a two-dimensional scanning pattern that increases throughput without requiring complex multi-axis mechanical systems
2Manufacturing precision
If conventional systems use single writing units with basic movement, then device complexity is lower, but manufacturing precision deteriorates due to inability to control errors to 50 nm or better
Solution Approach 1:
The system incorporates feedback mechanisms where writing unit positions and drum rotation are continuously monitored and adjusted. This enables real-time compensation for positioning errors and maintains manufacturing precision of 50 nm or better through active control rather than relying solely on mechanical precision
Solution Approach 2:
The system uses dynamic positioning where writing units can move axially along the drum axis while the drum rotates. This dynamic capability allows the system to adjust writing positions on the fly, enabling high precision patterning without requiring all components to be perfectly rigid or pre-positioned
3Productivity
If conventional systems use limited writing units, then device complexity is reduced, but throughput deteriorates due to sequential processing of large workpieces
Solution Approach 1:
The system merges multiple writing units on a single rotating drum, allowing simultaneous patterning of different workpiece zones. This combining of parallel processing capabilities achieves high throughput while the rotational geometry naturally eliminates stitching boundaries by providing continuous coverage without sharp transitions between sequentially processed areas
4Productivity
If conventional systems use single optical writing units, then device complexity is lower, but throughput and manufacturing precision deteriorate due to visible artifacts and Mura defects
Solution Approach 1:
The workpiece surface is divided into multiple zones, each patterned by a separate writing unit. This segmentation prevents Mura defects by ensuring that no single writing unit's periodic artifacts dominate the entire pattern, and the rotational geometry distributes any local variations across the workpiece
Solution Approach 2:
The system varies writing parameters such as axial positions and timing for different writing units. By changing these parameters, the system ensures that periodic artifacts from individual units do not align and create visible Mura patterns, thereby eliminating harmful visual defects while maintaining high throughput
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enables increased throughput and resolution while minimizing errors and artifacts, reducing the complexity and cost of pattern generators, and improving the quality of patterns on large workpieces.
Implementation Method 1
exposing a layer of electromagnetic radiation sensitive material covering at least a portion of a surface of a workpiece
Data Source
AI summary
Patterns are written on workpieces, such as, glass sheets and/or plastic sheets used in, for example, electronic display devices such as LCDs. The workpiece may be larger than about 1500 mm may be used. An optical writing head with a plurality of writing units may be used. The workpiece and the writing head may be moved relative to one another to provide oblique writing.