Contour Roughness Standard Manufacturing via PSD Compensation

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Solution Overview

Problem

Current methods for manufacturing roughness standards struggle to accurately control and reproduce desired roughness patterns in micrometric or nanometric dimensions due to natural roughness induced by manufacturing processes, leading to inconsistencies in measurement and calibration of equipment.

Innovation Solution

A method involving defining a desired power spectral density (PSD) for roughness, manufacturing a reference pattern with zero roughness, measuring its PSD, calculating a corrected PSD by subtracting the reference PSD, and using this corrected PSD to create a standard pattern that accounts for natural roughness, ensuring the final product matches the desired roughness profile.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If a reference pattern with zero roughness is manufactured, then the natural roughness induced by the manufacturing process can be measured and quantified, but the desired roughness profile cannot be directly achieved because the manufacturing process always introduces natural roughness

Engineering Contradiction:

Improveroughness measurement accuracyVSAvoidroughness profile control

Core Design Contradiction:

Measurement precisionVSManufacturing precision

Solution Approach 1:

The method applies preliminary anti-action by measuring the natural roughness introduced by the manufacturing process in advance (through reference pattern measurement) and then compensating for it in the inverse model. This allows the programmed roughness to counterbalance the natural roughness, achieving the desired roughness profile in the final standard.

Inventive Principle:

Principle #9Preliminary anti-action

Solution Approach 2:

The method performs preliminary action by creating an inverse model that pre-compensates for the manufacturing process effects. The model is constructed beforehand using reference measurements, and this pre-calculated compensation is then applied when generating the pattern to be manufactured, ensuring the final roughness matches the target.

Inventive Principle:

Principle #10Preliminary action

2Ease of manufacture

If the natural roughness induced by manufacturing conditions is not taken into account, then the manufacturing process is simpler, but the final roughness of the standard does not match the desired roughness

Engineering Contradiction:

Improvemanufacturing process simplicityVSAvoidroughness specification accuracy

Core Design Contradiction:

Ease of manufactureVSManufacturing precision

Solution Approach 1:

Inventive Principle:

Principle #10Preliminary action

Solution Approach 2:

The method implements feedback by using measurements from reference patterns (manufactured under known conditions) to build an inverse model. This model captures the relationship between manufacturing conditions and resulting roughness, allowing the system to adjust the programmed roughness to compensate for process-induced variations.

Inventive Principle:

Principle #23Feedback

3Productivity

If equipment is calibrated using standards with unknown or uncontrolled roughness, then the calibration process is faster, but the accuracy and reliability of equipment performance assessment deteriorates

Engineering Contradiction:

Improvecalibration speedVSAvoidequipment calibration accuracy

Core Design Contradiction:

ProductivityVSMeasurement precision

Solution Approach 1:

The method performs preliminary action by pre-characterizing the manufacturing process through reference pattern measurements and building an inverse model. This preparation work is done once, allowing subsequent standards to be manufactured with controlled roughness without repeating the full characterization process, thus maintaining both speed and accuracy.

Inventive Principle:

Principle #10Preliminary action

Solution Approach 2:

The method uses copying by creating a mathematical model (inverse model) that replicates the relationship between manufacturing conditions and roughness outcomes. This model can be applied repeatedly to generate multiple standards with known roughness characteristics, ensuring consistency and accuracy across different calibration events.

Inventive Principle:

Principle #26Copying

Data Source

PatentEP3809205A1Method for manufacturing a standard for roughness of contour

Publication Date: 2021.04.21 COMMISSARIAT A LENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES

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AI summary

The invention relates in particular to a method for manufacturing a contour roughness standard comprising the following steps: - defining (10) a desired power spectral density PSDs desired for the contour roughness of at least one given pattern, - manufacturing (20) at least one reference pattern from a reference drawing of at least one given pattern and with given manufacturing conditions Freference, the reference drawing having zero roughness, - performing a measurement (21) Mreference, with measurement conditions Ereference, of the roughness of the manufactured reference pattern, - on the basis of the measurement Mreference, calculating (22) the power spectral density PSDreference of the roughness of the manufactured reference pattern;- calculate (30) a corrected power spectral density PSDcorrected such that PSDcorrected = PSDdesired - PSDreference, - define (40) a corrected design exhibiting a roughness respecting PSDcorrected, - manufacture (50) at least one standard pattern from said corrected design, and with said given manufacturing conditions Freference.;