RPS Power Coupling Circuit for Uniform Current Sharing
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Solution Overview
Problem
The challenge of achieving uniform current sharing among power modules in a remote plasma source (RPS) during power boosting is critical, as uneven current distribution can lead to system instability and potential crashes, particularly in high-power applications.
Innovation Solution
A three-loop control system is implemented, comprising a power loop, current loop, and current sharing loop, coupled with a three-winding transformer, to ensure uniform current sharing and output power boosting in the RPS system.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Power
If multiple power modules are connected in parallel to achieve high-power output, then the power output is improved, but the current sharing uniformity deteriorates due to parameter differences between modules
Solution Approach 1:
The patent implements an active current sharing control system that continuously monitors the output current of each parallel power module and adjusts their operating parameters in real-time based on feedback signals. This closed-loop feedback mechanism compensates for parameter differences between modules, ensuring uniform current distribution while maintaining high-power output capability.
Solution Approach 2:
The patent dynamically adjusts operating parameters (such as duty cycle, switching frequency, or impedance) of individual power modules based on their current load conditions. By changing these parameters in response to detected current imbalances, the system optimizes current sharing among parallel modules while preserving the high-power output benefit of parallel configuration.
2Device complexity
If centralized power supply is used to simplify system structure, then the device complexity is reduced, but the electrical stress on power devices increases
Solution Approach 1:
The patent divides the centralized power supply into multiple distributed power modules connected in parallel. Each module operates independently with its own power devices, thereby reducing the electrical stress on individual components while maintaining a relatively simple overall system structure through modular architecture.
Solution Approach 2:
The patent introduces a current sharing controller as an intermediary component that coordinates the operation of parallel power modules. This mediator distributes the total power demand across multiple modules, preventing any single module from bearing excessive electrical stress while keeping the system structure manageable through centralized control of distributed elements.
3Ease of operation
If external characteristic current sharing method is used, then the control simplicity is improved, but the current sharing accuracy deteriorates
Solution Approach 1:
The patent employs active current sharing control with real-time feedback from current sensors on each parallel module. The controller continuously monitors actual current output and adjusts module parameters accordingly, achieving high current sharing accuracy while maintaining relatively simple control logic through standardized feedback processing for all modules.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system achieves automatic and uniform current sharing among power modules, enhancing system stability and redundancy, and enabling flexible design for high-capacity modular power supplies.
Implementation Method 1
a three-winding transformer, including: a primary winding respectively connected to the two current sharing circuits; and a secondary winding connected to the chamber load
Data Source
AI summary
A remote plasma source (RPS) power coupling circuit and a control system are provided. The RPS power coupling circuit includes a direct-current (DC) voltage source, two current sharing circuits, a three-winding transformer, and a chamber load, where the current sharing circuits each include a full-bridge inverter circuit, a resonant converter, and a current sharing resistor Ro; the DC voltage source is input to the full-bridge inverter circuit; the resonant converter is connected to the full-bridge inverter circuit; the resonant converter includes an inductor Lr, a capacitor Cr, and an inductor Lk; the inductor Lr, is connected to the full-bridge inverter circuit; the inductor Lk is connected to the three-winding transformer; the current sharing resistor Ro is connected to the inductor Lk; and the three-winding transformer includes primary winding coils respectively connected to the two current sharing circuits, and a secondary winding coil connected to the chamber load.