Resonant Tunneling Diode Superlattice Barrier for Mobility Control

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Current semiconductor devices do not fully leverage advanced materials and processing techniques to achieve optimal performance, particularly in terms of charge carrier mobility and integration with standard CMOS processes.

Innovation Solution

The development of a semiconductor device with a resonant tunneling diode structure that incorporates a superlattice with non-semiconductor monolayers constrained within the crystal lattice of semiconductor portions, enhancing electron mean free path control and providing improved conductivity effective mass characteristics, allowing for higher charge carrier mobility and integration with standard CMOS processes.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Speed

If conventional semiconductor structures are used, then manufacturing simplicity is maintained, but charge carrier mobility is limited due to scattering effects

Engineering Contradiction:
Improvecharge carrier mobilityVSAvoidstructure complexity
Core Design Contradiction:
SpeedVSDevice complexity

Solution Approach 1:

The barrier layer is segmented into a superlattice structure comprising multiple alternating layers of first semiconductor material and second semiconductor material. This segmentation creates multiple interfaces that control electron mean free path and reduce scattering effects, thereby improving charge carrier mobility while managing the increased structural complexity through systematic layering

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The invention employs composite material structures where the barrier layer is formed by combining two different semiconductor materials in a superlattice configuration. This composite approach allows tuning of electronic properties to enhance mobility while maintaining compatibility with standard CMOS manufacturing processes

Inventive Principle:
Principle #40Composite materials

2Speed

If advanced materials and processing techniques are implemented, then charge carrier mobility is enhanced, but integration with standard CMOS processes becomes difficult

Engineering Contradiction:
Improvecharge carrier mobilityVSAvoidintegration with CMOS processes
Core Design Contradiction:
SpeedVSEase of manufacture

Solution Approach 1:

The invention adjusts material parameters such as layer thickness, composition ratios, and crystal orientation to optimize charge carrier mobility while ensuring compatibility with standard CMOS fabrication conditions. By carefully controlling these parameters, the superlattice structure achieves enhanced performance without requiring non-standard manufacturing processes

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The superlattice structure is designed with homogeneous alternating layers that maintain consistent electronic properties throughout the barrier region. This homogeneity ensures predictable device behavior and facilitates integration with standard CMOS processes by providing uniform electrical characteristics that can be reliably manufactured

Inventive Principle:
Principle #33Homogeneity

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach results in enhanced charge carrier mobility and reduced scattering effects, enabling improved performance in semiconductor devices and facilitating integration with standard CMOS processes, while also providing potential benefits for opto-electronic devices and other applications.

Implementation Method 1

a resonant tunneling diode structure with electron mean free path control layers comprising a superlattice

Methodology Applied
Scientific EffectResonant tunneling:

Implementation Method 2

reduced scattering effects, enabling improved performance in semiconductor devices

Methodology Applied
Scientific EffectScattering reduction: Scattering

Implementation Method 3

providing improved conductivity effective mass characteristics

Methodology Applied
Scientific EffectBand structure engineering:

Implementation Method 4

The resulting biaxial strain in the upper silicon layer alters the carrier mobilities enabling higher speed

Methodology Applied
Scientific EffectStrain-induced mobility enhancement:

Data Source

PatentEP3497728B1Semiconductor device including a resonant tunneling diode structure with electron mean free path control layers comprising a superlattice and associated methods
Publication Date: 2021.05.26 ATOMERA INC
  • EP3497728B1 patent drawingFigure 1
  • EP3497728B1 patent drawingFigure 2
  • EP3497728B1 patent drawingFigure 3

AI summary

A semiconductor device includes at least one double-barrier resonant tunneling diode (DBRTD). The at least one DBRTD includes a first doped semiconductor layer, and a first barrier layer on the first doped semiconductor layer and including a superlattice. The DBRTD further includes a first intrinsic semiconductor layer on the first barrier layer, a second barrier layer on the first intrinsic semiconductor layer and also including the superlattice, a second intrinsic semiconductor layer on the second barrier layer, a third barrier layer on the second intrinsic semiconductor layer and also including the superlattice. A third intrinsic semiconductor layer is on the third barrier layer, a fourth barrier layer is on the third intrinsic semiconductor layer and also including the superlattice, a second doped semiconductor layer is on the fourth barrier layer.