Ru-Doped InP Current Blocking Layer for Optoelectronic Devices

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Solution Overview

Problem

Conventional current blocking structures in optoelectronic devices suffer from thyristor action and high leakage current at high drive currents and temperatures, limiting their efficiency and suitability for high bit rate modulation due to large parasitic capacitance and inter-diffusion issues with dopants like Fe and Zn.

Innovation Solution

The use of a thinner n-type ruthenium (Ru)-doped indium phosphide (InP) layer with low carrier mobility in current blocking junctions, grown using atmospheric pressure MOVPE with high vapour pressure precursors, reduces leakage current and prevents thyristor breakdown, allowing for effective current blocking without increasing device thickness.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a conventional reverse biased p-n junction current blocking structure is used, then current blocking is achieved, but high leakage current and thyristor action occur at high drive currents and temperatures

Engineering Contradiction:
Improvecurrent blocking efficiencyVSAvoidleakage current
Core Design Contradiction:
ReliabilityVSObject-generated harmful factors

Solution Approach 1:

The patent changes the material composition parameter by using Ru-doped InP instead of conventional Fe-doped InP or Zn-doped InP. This material substitution fundamentally alters the electrical properties, achieving low leakage current and preventing thyristor action at high temperatures and drive currents while maintaining effective current blocking

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent employs a composite doping approach by combining Ru dopant with InP substrate to create a novel semiconductor material with superior electrical characteristics. This composite material structure enables simultaneous achievement of low capacitance, low leakage current, and high temperature stability

Inventive Principle:
Principle #40Composite materials

2Object-generated harmful factors

If the n-type semiconductor layer thickness is increased to reduce leakage, then leakage current decreases, but device thickness increases and capacitance increases

Engineering Contradiction:
Improveleakage currentVSAvoiddevice thickness
Core Design Contradiction:
Object-generated harmful factorsVSLength of stationary object

Solution Approach 1:

The patent changes the doping concentration parameter of the n-type layer to an optimized range that achieves low leakage current without requiring increased thickness. The Ru-doped InP layer with specific doping concentrations enables effective current blocking at reduced thickness, simultaneously lowering capacitance while maintaining low leakage performance

Inventive Principle:
Principle #35Parameter changes

3Reliability

If Fe and Zn dopants are used in current blocking structures, then current blocking is achieved, but inter-diffusion issues occur between dopants

Engineering Contradiction:
Improvecurrent blocking functionVSAvoiddopant distribution
Core Design Contradiction:
ReliabilityVSStability of the object's composition

Solution Approach 1:

The patent changes the dopant identity parameter from Fe or Zn to Ru, which has different diffusion characteristics. This substitution eliminates inter-diffusion issues between dopants while maintaining effective current blocking function, achieving stable dopant distribution throughout device operation

Inventive Principle:
Principle #35Parameter changes

4Productivity

If conventional current blocking structures are used, then device operation is achieved, but high parasitic capacitance limits high bit rate modulation

Engineering Contradiction:
Improvebit rateVSAvoidparasitic capacitance
Core Design Contradiction:
ProductivityVSLoss of energy

Solution Approach 1:

The patent changes the material composition parameter to Ru-doped InP, which enables reduced layer thickness while maintaining current blocking effectiveness. This thickness reduction directly decreases parasitic capacitance, enabling high bit rate modulation operation without energy loss limitations

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The implementation of a thin n-type Ru-InP layer significantly reduces electron travel through the blocking structure, preventing excess leakage and thyristor action, enhancing the efficiency and performance of optoelectronic devices at high temperatures and bit rates.

Implementation Method 1

an unexpectedly low carrier mobility for an n-type material

Methodology Applied
Scientific EffectCarrier mobility:

Implementation Method 2

The lower the capacitance, the higher the speed of the device

Methodology Applied
Scientific EffectElectrical resistance: Electrical Resistance

Implementation Method 3

Semiconductor devices commonly use the deposition method MOVPE (Metal Organic Vapour Phase Epitaxy)

Methodology Applied
Scientific EffectMetal organic vapour phase epitaxy: Epitaxy

Implementation Method 4

the holes at the junction material migrate away towards the p-type material whilst the electrons at the junction migrate away towards the n-type material

Methodology Applied
Scientific EffectDiffusion: Diffusion

Implementation Method 5

When electrons and holes combine in a direct band gap semiconductor material, the electrons lose energy and turn from conduction electrons to valence electrons and in the process can emit light

Methodology Applied
Scientific EffectElectroluminescence: Electroluminescence

Implementation Method 6

a layer of undoped intrinsic semiconductor material, which is configured to physically separate the semiconductor material arrangement and the first p-type semiconductor material layer

Methodology Applied
Scientific EffectPhysical separation: Physical Containment

Data Source

PatentEP2526593B1Opto-electronic device
Publication Date: 2017.04.05 THE CENT FOR INTEGRATED PHOTONICS
  • EP2526593B1 patent drawingFigure 1
  • EP2526593B1 patent drawingFigure 2
  • EP2526593B1 patent drawingFigure 3

AI summary

The present invention provides a current blocking structure for electronic devices, preferably optoelectronic devices. The current blocking structure comprises a semiconductor material arrangement comprising an n-type ruthenium doped indium phosphide (Ru-InP) layer and a first p-type semiconductor material layer wherein the n-type Ru-InP layer is less than 0.6µm thick. The semiconductor material arrangement and p-type semiconductor material layer form a current blocking p-n junction. The current blocking structure may further comprise other n-type layers and/or multiple n-type Ru-InP layers and/or intrinsic/undoped layers wherein the n-type Ru-InP layers may be thicker than 0.6µm.