Ru-P-Al Catalyst Decomposition of Halogen Acid Gases
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Solution Overview
Problem
Current methods for decomposing perfluorinated compounds, such as oxidation, plasma decomposition, chemical sorption, and catalytic oxidation, face challenges like high energy consumption, complex systems, economic issues due to sorbent replacement, and catalyst deterioration from halogen compounds, necessitating a catalyst with improved durability and efficiency.
Innovation Solution
A Ru—P—Al tri-component catalyst is developed, comprising an aluminum oxide catalyst with ruthenium and phosphorus promoters, where ruthenium is loaded in the range of 0.05-0.3 parts by weight and phosphorus in 1.0-5.0 parts by weight, supported on aluminum oxide, allowing for effective decomposition of perfluorinated compounds containing halogen acidic gases.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If catalytic oxidation is used to decompose perfluorinated compounds, then decomposition efficiency is improved, but catalyst durability deteriorates due to deterioration from halogen compounds
Solution Approach 1:
The patent uses a composite catalyst material consisting of aluminum oxide support with ruthenium and phosphorus promoters. This composite structure combines the high catalytic activity of ruthenium with the stability of aluminum oxide and the promotional effect of phosphorus, achieving both high decomposition efficiency and improved durability against halogen compound deterioration.
Solution Approach 2:
The patent optimizes the loading amounts of ruthenium (0.05-0.3 parts by weight) and phosphorus (1.0-5.0 parts by weight) relative to aluminum oxide. By carefully controlling these compositional parameters, the catalyst achieves the optimal balance between catalytic activity and resistance to deactivation by halogen compounds.
2Productivity
If oxidation method is used to decompose perfluorinated compounds, then decomposition is achieved, but energy consumption increases
Solution Approach 1:
The catalytic oxidation method using the Ru-P-Al catalyst enables decomposition at reduced reaction temperatures compared to conventional thermal oxidation. The catalyst lowers the activation energy barrier, allowing the decomposition to proceed efficiently at lower temperatures, thus reducing energy consumption while maintaining high decomposition capability.
3Object-generated harmful factors
If chemical sorption is used to treat perfluorinated compounds, then treatment is free of exhaust gas, but economic problem arises due to periodic replacement of sorbent
Solution Approach 1:
The catalytic oxidation system continuously converts perfluorinated compounds into harmless products (CO2, HF, H2O) through catalytic action, eliminating the need for periodic sorbent replacement. The catalyst maintains its activity over extended periods, making the system economically viable while still achieving exhaust gas-free operation.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The Ru—P—Al tri-component catalyst exhibits high decomposition efficiency and durability, maintaining activity over time, effectively decomposing perfluorinated compounds in semiconductor and LCD fabrication processes, even with halogen acidic gases like F2, Cl2, and Br2, reducing the need for frequent catalyst replacement and energy consumption.
Implementation Method 1
catalytic oxidation is a process that allows decomposition of perfluorinated compound by catalyst at reduced reaction temperature with increased decomposition efficiency
Implementation Method 2
The oxidation is the process that decomposes the compound by burning with electric energy at high temperature
Implementation Method 3
a Ru—P—Al tri-component catalyst to decompose perfluorinated compounds is provided, which includes an aluminum oxide catalyst, and promoters supported on the catalyst
Data Source
AI summary
The present invention provides a catalyst for the decomposition of a perfluorinated compound containing a halogen acid gas, and a preparation method thereof. According to the present invention, the Ru—P—Al tri-component catalyst for the decomposition of a perfluorinated compound shows an excellent decomposition activity and durability with respect to the decomposition and removal of a perfluorinated compound containing a halogen acid gas, and thus can be used to decompose a chamber cleaning gas, an etchant, a solvent and the like of a perfluorinated compound from the semiconductor manufacturing industry to the LCD processing field. In addition, the present invention can be useful for decomposing and removing a perfluorinated compound discharged in a process using a halogen acid gas such as F2, Cl2, Br2 and the like.