Ruthenium Alloy Electrode for Non-Volatile Switching Element

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Solution Overview

Problem

Non-volatile switching elements face challenges in maintaining the ON or OFF state for extended periods with low electrical current usage, as the amount of current required for rewriting is high due to the need for a thick metal bridge, which is prone to electro-migration and ionization, leading to increased resistance and potential disconnection.

Innovation Solution

A variable resistance element with a second electrode made from a ruthenium alloy and a polymer ion conduction layer, where the ruthenium alloy has a higher standard Gibbs energy for oxidation, reducing the current required for rewriting and improving the stability of the metal bridge, allowing for low-power programming with high holding ability.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a thick metal bridge is formed in the ion conduction layer, then the holding ability to maintain ON state is improved, but the amount of current required for rewriting increases and the metal bridge becomes prone to electro-migration and ionization

Engineering Contradiction:
Improveholding abilityVSAvoidcurrent for rewriting
Core Design Contradiction:
ReliabilityVSUse of energy by moving object

Solution Approach 1:

The invention changes the material parameter of the second electrode from conventional materials to ruthenium alloy, which has a higher standard Gibbs energy for oxidation. This parameter change allows the metal bridge to be thinner while maintaining stability, thereby reducing the rewriting current requirement while preserving holding ability.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The invention uses a composite structure consisting of a polymer ion conduction layer and a ruthenium alloy second electrode. This composite material system provides both the necessary ion conduction pathway and the high stability interface that prevents excessive metal ion generation, resolving the contradiction between holding ability and rewriting current.

Inventive Principle:
Principle #40Composite materials

2Reliability

If a thick metal bridge is formed in the ion conduction layer, then the holding ability to maintain ON state is improved, but the metal bridge becomes prone to electro-migration and ionization leading to increased resistance and potential disconnection

Engineering Contradiction:
Improveholding abilityVSAvoidelectro-migration and ionization
Core Design Contradiction:
ReliabilityVSObject-affected harmful factors

Solution Approach 1:

By changing the electrode material parameter to ruthenium alloy with higher oxidation resistance, the invention suppresses the harmful electro-migration and ionization effects while maintaining a thin metal bridge structure, thereby improving reliability without requiring a thick bridge.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The invention effectively makes the metal bridge 'short-living' in terms of ion generation by using the ruthenium alloy electrode that prevents excessive ionization. This approach reduces the cumulative damage from electro-migration and ionization events over time.

Inventive Principle:
Principle #27Cheap short-living objects (Disposable)

3Ease of manufacture

If copper wiring is used as the first electrode to simplify manufacturing, then the manufacturing process is simplified and element size is reduced, but the copper surface oxidizes when the porous polymer ion conduction layer is directly formed on it

Engineering Contradiction:
Improvemanufacturing processVSAvoidoxidation of copper surface
Core Design Contradiction:
Ease of manufactureVSObject-affected harmful factors

Solution Approach 1:

The invention introduces an oxidation prevention film as an intermediary layer between the copper first electrode and the porous polymer ion conduction layer. This mediator prevents direct oxidation of copper while allowing the ion conduction layer to function properly, thus maintaining both ease of manufacture and preventing harmful oxidation.

Inventive Principle:
Principle #24Intermediary (Mediator)

4Use of energy by moving object

If the second electrode is made from ruthenium alloy with higher standard Gibbs energy for oxidation, then the current required for rewriting is reduced and metal bridge stability is improved, but the device complexity increases

Engineering Contradiction:
Improvecurrent for rewritingVSAvoidelectrode material composition
Core Design Contradiction:
Use of energy by moving objectVSDevice complexity

Solution Approach 1:

The invention changes the material parameter of the second electrode to ruthenium alloy, which inherently provides both low rewriting current and high stability. This single parameter change addresses multiple performance requirements simultaneously, offsetting the increased material complexity with improved overall device performance.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution enables reliable long-term operation with reduced power consumption by improving the adhesion and stability of the metal bridge, maintaining low resistance values and preventing disconnection, thus enhancing the reliability of programmable-logic wiring changeover switches.

Implementation Method 1

a metal ion is generated due to metal oxidation

Methodology Applied
Scientific EffectOxidation: Oxidation

Implementation Method 2

a metal is ionized and a generated metal ion is introduced into the ion conduction layer

Methodology Applied
Scientific EffectElectrochemical reaction: Redox Reactions

Implementation Method 3

metal deposition due to reduction of the metal ion is utilized

Methodology Applied
Scientific EffectReduction: Reduction

Implementation Method 4

the metal ion is reduced and the metal deposits. Since the deposited metal forms a metal bridge

Methodology Applied
Scientific EffectElectrodeposition: Electrodeposition

Implementation Method 5

a porous polymer ion conduction layer

Methodology Applied
Scientific EffectIon conduction: Conduction (electrical)

Implementation Method 6

an ion conduction layer conducting a metal ion

Methodology Applied
Scientific EffectIon migration: Ion Exchange

Implementation Method 7

improving the adhesion and stability of the metal bridge

Methodology Applied
Scientific EffectAdhesion: Adhesive

Data Source

PatentUS10103329B2Switching element and method for manufacturing switching element
Publication Date: 2018.10.16 NANOBRIDGE SEMICON INC
  • US10103329B2 patent drawing
  • US10103329B2 patent drawing
  • US10103329B2 patent drawing

AI summary

The present invention provides a non-volatile switching element that can be applied to a programmable-logic wiring changeover switch and in which an electrochemical reaction is used. Of the two electrodes for applying a bias voltage to the variable resistance layer of the non-volatile switching element, the electrode that does not feed metal ions to the variable resistance layer when the switch is in the ON state is made from a ruthenium alloy. The ruthenium alloy includes ruthenium and a metal in which the standard Gibbs energy of forming ΔG when metal ions are generated from the metal is higher in the negative direction than ΔG of ruthenium. As a result, it becomes possible to maintain the low-resistance state in the ON state for a longer period of time without increasing the amount of electrical current required when a switch is made between the ON state and the OFF state.