SACM Avalanche Photodiode With Quantum Dots

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Solution Overview

Problem

Current fiber optic communication systems face limitations in bandwidth and sensitivity, particularly in high-speed applications, due to the need for higher operating voltages and temperature compensation in avalanche photodiodes, which can be inefficient and costly to manufacture.

Innovation Solution

A separate absorption charge and multiplication (SACM) avalanche photodiode structure is developed, featuring an N-doped anode region, a P-doped cathode region, and P-doped charge regions with embedded quantum dots, along with an N-doped impact ionization region, to enhance sensitivity and efficiency.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a standard avalanche photodiode structure is used to achieve internal gain and improved receiver sensitivity, then receiver sensitivity and signal-to-noise ratio are enhanced, but higher operating voltages are required which increase manufacturing complexity and cost

Engineering Contradiction:
Improvereceiver sensitivityVSAvoidmanufacturing complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The photodiode is divided into separate absorption region and multiplication region with distinct doping profiles (P-doped charge region with quantum dots and N-doped impact ionization region). This segmentation allows each region to be optimized independently for its specific function while reducing overall device complexity and manufacturing difficulty

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Different regions of the photodiode are assigned different doping types and structures: P-doped charge region for efficient photon absorption and charge generation, N-doped impact ionization region for avalanche multiplication. This local differentiation optimizes performance in each region while simplifying the overall manufacturing process compared to uniform structures

Inventive Principle:
Principle #3Local quality

2Power

If higher operating voltages are applied to achieve avalanche gain in photodiodes, then internal gain and receiver sensitivity are improved, but temperature compensation requirements increase manufacturing cost

Engineering Contradiction:
Improveinternal gainVSAvoidmanufacturing cost
Core Design Contradiction:
PowerVSEase of manufacture

Solution Approach 1:

The invention changes the fundamental parameters of the photodiode structure by implementing separate P-doped and N-doped regions with quantum dots, which modifies the electric field distribution and carrier multiplication mechanism. This allows for reduced operating voltages while maintaining internal gain, thereby reducing temperature compensation requirements and manufacturing costs

Inventive Principle:
Principle #35Parameter changes

3Reliability

If quantum dots are embedded in P-doped charge regions to enhance photon absorption, then quantum conversion efficiency is improved, but device structure complexity increases

Engineering Contradiction:
Improvequantum conversion efficiencyVSAvoidstructure complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

Quantum dots are embedded within the P-doped charge region matrix, creating a nested structure where the quantum dots are contained within the doped semiconductor region. This nesting approach enhances quantum conversion efficiency while integrating the quantum dot functionality into the existing photodiode structure, thereby limiting the increase in overall device complexity

Inventive Principle:
Principle #7Nested doll (Nesting)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The SACM avalanche photodiode structure improves receiver sensitivity and signal-to-noise ratio, enabling higher bandwidth and reduced manufacturing costs while maintaining high-speed performance.

Implementation Method 1

A photon is absorbed in a relatively high E (electric) field region, where an electron-hole pair is created

Methodology Applied
Scientific EffectPhotoelectric effect: Photoelectric Effect

Implementation Method 2

In the presence of sufficiently high electric field intensity, an initial photon-induced carrier can seed an avalanche process in which carriers obtain enough energy from the electric field to generate additional carrier pairs through impact ionization

Methodology Applied
Scientific EffectImpact ionization: Avalanche Breakdown

Data Source

PatentUS11309447B2Separate absorption charge and multiplication avalanche photodiode structure and method of making such a structure
Publication Date: 2022.04.19 GLOBALFOUNDRIES US INC
  • US11309447B2 patent drawing
  • US11309447B2 patent drawing
  • US11309447B2 patent drawing

AI summary

One illustrative photodiode disclosed herein includes an N-doped anode region, a P-doped cathode region and at least one P-doped charge region positioned laterally between the N-doped anode region and the P-doped cathode region. In this example, the photodiode also includes a plurality of quantum dots embedded within the at least one P-doped charge region and an N-doped impact ionization region positioned laterally between the N-doped anode region and the at least one P-doped charge region.