Safety Plugin for Semiconductor Wafer Manufacturing

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Solution Overview

Problem

Complex machines in industrial settings, such as silicon wafer manufacturing, lack the ability to assess whether combined instructions from different machines could result in unsafe conditions, despite individual instructions being safe when considered independently.

Innovation Solution

A computing device system that stores the state of each machine, generates pending outputs, and determines whether issuing those outputs would result in an unsafe condition, blocking them if necessary, using a safety plugin that references a lookup table of machine states and corresponding safe and unsafe conditions.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If individual machine safety mechanisms are used to prevent unsafe operations, then machine-level safety is improved, but system-level unsafe conditions caused by combined machine operations cannot be detected

Engineering Contradiction:
Improvemachine-level safetyVSAvoidsystem-state awareness
Core Design Contradiction:
ReliabilityVSLoss of information

Solution Approach 1:

A safety plugin acts as an intermediary component between the control server and machines. It receives pending outputs from the control server, evaluates them against stored system states and safety rules, and determines whether to allow or block the outputs. This intermediary structure enables centralized safety monitoring without disrupting individual machine operations.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The system implements feedback by continuously monitoring machine states through sensors and communicating them to the control server. The safety plugin uses this feedback information to evaluate pending outputs and make real-time safety decisions, ensuring that system-level unsafe conditions are detected and prevented.

Inventive Principle:
Principle #23Feedback

2Productivity

If a control server issues instructions based on individual machine needs, then operational efficiency is improved, but system-wide unsafe conditions may occur due to lack of holistic state assessment

Engineering Contradiction:
Improveoperational efficiencyVSAvoidsystem-wide safety
Core Design Contradiction:
ProductivityVSReliability

Solution Approach 1:

The safety plugin performs preliminary evaluation of pending outputs before they are executed by the machines. By assessing the combined system state and potential unsafe conditions in advance, the system prevents hazardous operations from occurring, while still allowing efficient operational control through the control server.

Inventive Principle:
Principle #10Preliminary action

3Strength

If safety mechanisms block potentially harmful instructions, then machine protection is improved, but system coordination and productive operations may be hindered

Engineering Contradiction:
Improvemachine protectionVSAvoidsystem coordination
Core Design Contradiction:
StrengthVSEase of operation

Solution Approach 1:

The safety plugin serves as an intelligent intermediary that distinguishes between truly harmful instructions and those that are safe when considered in the context of the overall system state. It blocks only those outputs that would create unsafe conditions while allowing productive operations to proceed, thus maintaining both machine protection and system coordination.

Inventive Principle:
Principle #24Intermediary (Mediator)

Data Source

PatentUS10361106B2Methods and systems for preventing unsafe operations
Publication Date: 2019.07.23 GLOBALWAFERS CO LTD
  • US10361106B2 patent drawing
  • US10361106B2 patent drawing
  • US10361106B2 patent drawing

AI summary

A system for preventing an unsafe operation of a plurality of semiconductor wafer manufacturing machines communicatively coupled to a computing device. The system includes the computing device, which includes a processor coupled to a memory. The memory contains processor-executable instructions that, when executed, cause the computing device to perform the steps of storing, in the memory, a first state of a first machine of the plurality of machines, generating a first pending output to be issued to the first machine, determining whether an unsafe condition would result if the first pending output is issued to the first machine in the first state, issuing the first pending output upon determining that issuing the first pending output would not result in an unsafe condition, and blocking the first pending output from being issued upon determining that issuing the first pending output would result in an unsafe condition.