Self-Aligned Imprint Lithography Sensor Array Manufacturing

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Solution Overview

Problem

Current methods for manufacturing sensor templates for chemical and biological testing face challenges such as high costs, precision issues in material deposition, and complexity in maintaining sterile conditions, leading to discarded templates and high costs per test.

Innovation Solution

The method involves using Self-Aligned Imprint Lithography (SAIL) to create a 3D patterned resist layer on a flexible substrate, allowing for precise alignment and low-cost manufacturing of sensor arrays by depositing reagents and etching to form a sensor array structure, which can be used for roll-to-roll processing.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If traditional photolithography and imprint lithography are used to manufacture test templates with precise dimensions, then manufacturing precision is improved, but manufacturing cost increases significantly

Engineering Contradiction:
Improvetemplate dimension precisionVSAvoidmanufacturing cost
Core Design Contradiction:
Manufacturing precisionVSEase of manufacture

Solution Approach 1:

The patent uses a master template to create multiple copies of sensor templates through a copying process. The master template contains precise patterns that are replicated onto multiple substrate templates, achieving high manufacturing precision while reducing the cost per template. This is accomplished by forming a resist layer on the substrate template, applying the master template to transfer the pattern, and then developing the resist to create the sensor template structure.

Inventive Principle:
Principle #26Copying

2Adaptability or versatility

If multiple agents and reagents are deposited into single cells with complex patterns, then testing capability is improved, but deposition precision and placement accuracy deteriorate

Engineering Contradiction:
Improvetesting capabilityVSAvoiddeposition precision
Core Design Contradiction:
Adaptability or versatilityVSManufacturing precision

Solution Approach 1:

The patent segments the deposition process into multiple sequential steps, with each step depositing a specific agent or reagent into predetermined cells. The master template defines distinct regions for different materials, and the process deposits each material separately according to the pattern, ensuring precise placement even when multiple different agents and reagents are involved in the final sensor array.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent performs preliminary actions by first creating the master template with all pattern definitions before actual sensor template manufacturing. The master template pre-establishes the precise locations and patterns for all subsequent material depositions, allowing complex multi-material patterns to be achieved with high precision through predetermined positioning rather than attempting to place multiple materials simultaneously.

Inventive Principle:
Principle #10Preliminary action

3Reliability

If strict sterility and test parameter controls are maintained, then test reliability is improved, but template acceptance rate decreases due to quality control discards

Engineering Contradiction:
Improvetest reliabilityVSAvoidtemplate acceptance rate
Core Design Contradiction:
ReliabilityVSProductivity

Solution Approach 1:

The patent implements self-service quality control through the master template copying process. The master template itself serves as the quality reference, and each sensor template automatically receives the precise pattern transfer during the copying process. This self-aligning mechanism ensures that templates meet sterility and parameter requirements without requiring extensive post-manufacturing inspection and sorting, thereby improving acceptance rates while maintaining reliability.

Inventive Principle:
Principle #25Self-service

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach reduces manufacturing costs, enhances precision in reagent placement, and allows for efficient large-scale production of sensor arrays, improving the cost-effectiveness and accuracy of chemical and biological testing.

Implementation Method 1

The method involves using Self-Aligned Imprint Lithography (SAIL) to create a 3D patterned resist layer on a flexible substrate

Methodology Applied
Scientific EffectSelf-Aligned Imprint Lithography:

Implementation Method 2

etching the three-dimensional structure to expose the one or more reagents

Methodology Applied
Scientific EffectEtching:

Data Source

PatentUS7470544B2Sensor array using sail
Publication Date: 2008.12.30 APPLIED MATERIALS INC
  • US7470544B2 patent drawing
  • US7470544B2 patent drawing
  • US7470544B2 patent drawing

AI summary

Provided is a sensor array and a method of forming the same. The sensor array includes an array of apertures etched into a 3D patterned resist layer to expose areas of one or more agents and/or reagents deposited on a substrate. The sensor is formed using a Self-Aligned Imprint Lithography (“SAIL”) method, a process that allows for a one-time deposition of all required materials followed by a series of etching/cleaning steps. The location of reagents on the sensor template, as well as the concentration gradient of each reagent, may be controlled through the sensor manufacturing process. Bores of a single reagent, or bores containing two or more reagents, may be formed using the SAIL process.