Self-Assembled Monolayer Patterning for Display Devices
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Solution Overview
Problem
Current methods for patterning organic layers in display devices, such as organic electroluminescent and quantum dot light emitting devices, face limitations in achieving ultra-high resolution due to the complexity and process margins of existing techniques.
Innovation Solution
A method involving the use of a self-assembled monolayer with a specific head group, spacer group, and terminal group is employed to pattern organic layers, where the monolayer is deposited using thermal evaporation, chemical vapor deposition, or electron beam evaporation, and desorbed using UV or plasma treatment to achieve high-resolution patterning.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a fine metal mask (FMM) patterning method is used to pattern the organic layer, then the organic layer can be patterned with high resolution, but the process complexity increases and process margins are reduced, limiting ultra-high resolution implementation
Solution Approach 1:
The patent extracts and removes the FMM layer after it has served its patterning function. The organic layer is patterned using the FMM as a temporary mask, then the FMM is completely removed, simplifying the final device structure while maintaining the benefits of high-resolution patterning during manufacturing
Solution Approach 2:
The FMM layer is formed in advance as a preliminary patterning structure. This allows the organic layer to be deposited and patterned with high precision before the FMM is removed, separating the patterning function from the final device structure
2Manufacturing precision
If a fine metal mask (FMM) patterning method is used to pattern the organic layer, then the organic layer can be patterned with high resolution, but the number of processes increases
Solution Approach 1:
The patent combines multiple functions into the FMM layer: it serves as both the patterning mask and a temporary structural element during organic layer deposition. The FMM is formed, the organic layer is patterned through it, and then the FMM is removed in a single integrated process sequence, reducing the total number of separate manufacturing steps
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enables the patterning of organic layers with ultra-high resolution, improving the manufacturing process for display devices by simplifying the process and enhancing resolution capabilities.
Implementation Method 1
the providing of the organic molecular thin film includes providing the self-assembled monolayer by thermal evaporation
Implementation Method 2
the providing of the organic molecular thin film includes providing the self-assembled monolayer by chemical vapor deposition
Implementation Method 3
the providing of the organic molecular thin film includes providing the self-assembled monolayer by electron beam evaporation
Implementation Method 4
the desorbing of the portion of the organic molecular thin film includes UV or plasma treating the organic molecular thin film
Implementation Method 5
the desorbing of the portion of the organic molecular thin film includes UV or plasma treating the organic molecular thin film
Data Source
AI summary
A manufacturing method of a display device includes: forming a first electrode on a base substrate; forming a pixel definition layer through which an opening is defined to expose an upper surface of the first electrode; providing an organic molecular thin film including a self-assembled monolayer on the first electrode and the pixel definition layer; desorbing a portion of the organic molecular thin film which corresponds to the first electrode; and providing at least one organic layer on the first electrode.