Sample Analysis Apparatus Electron Emission Timing Separation
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Solution Overview
Problem
Conventional scanning electron microscopes (SEM) face challenges in enhancing the resolution of two-dimensional contrast images due to the collection of electrons with different energies and output vectors, leading to loss of information regarding the energy distribution from the sample surface.
Innovation Solution
A sample analyzing apparatus comprising a charged beam generating unit, a detecting unit, and an analyzing unit, which includes a condenser lens control unit, deflection control unit, signal processing unit, and image processing unit to separate and process signals from secondary and reflected electrons based on their energy levels and emission timing, allowing for precise analysis of the sample's three-dimensional structure and material characteristics.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If electrons with different energies and output vectors are collected to improve the S/N ratio, then the resolution of the two-dimensional contrast image is improved, but information regarding the energy distribution from the sample surface is lost
Solution Approach 1:
The patent segments the electron detection process by separating electrons based on their emission timing and energy characteristics. Different detectors are positioned to collect electrons with different output vectors at different time periods, allowing both high S/N ratio and energy distribution information to be preserved simultaneously
Solution Approach 2:
The patent introduces a time dimension to the electron detection process by collecting electrons at different time periods corresponding to different emission vectors. This temporal separation allows the system to maintain high signal quality while preserving energy distribution information that would otherwise be lost in spatial mixing
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables highly precise sample analysis by separating detection signals based on emission timing and adjusting convergence angles, resulting in improved resolution and accurate identification of material distributions within the sample's surface and depth.
Implementation Method 1
a charged beam generating unit configured to generate a charged beam and apply the charged beam to a sample
Implementation Method 2
Secondary electrons, reflected electrons, and others that are generated from the sample surface accordingly are detected
Data Source
AI summary
In accordance with an embodiment, a sample analyzing apparatus includes a charged beam generating unit, a detecting unit, and an analyzing unit. The charged beam generating unit is configured to generate a charged beam and apply the charged beam to a sample. The detecting unit is configured to detect charged particles and then output a signal, the charged particles being generated from the sample by the application of the charged beam in a manner depending on a three-dimensional structure and material characteristics of the sample. The analyzing unit is configured to process the signal to analyze the sample.