Sample Attitude Control in Charged Particle Beam Apparatus
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Solution Overview
Problem
Current sample relocation methods in charged particle beam apparatuses face inefficiencies due to unstable sample attitude control during transfer from a substrate to a holder, leading to deviations from the original orientation, which complicates observation and additional working processes in transmission electron microscopes.
Innovation Solution
A method involving a marking process using a charged particle beam to apply markings on the sample, followed by a carriage process using a sample gripping means to relocate the sample, and an attitude control process that adjusts the sample's orientation based on the markings observed, ensuring the sample is maintained in the same attitude as before relocation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If a probe is used to carry the sample from the substrate to the holder, then the sample can be relocated, but the work efficiency decreases and work time becomes long due to bonding operations
Solution Approach 1:
The invention extracts and eliminates the bonding operation from the sample relocation process by introducing a gripper that mechanically grasps the sample. The sample is directly held by the gripper's holding portion without requiring any bonding to a probe, thereby removing the complex bonding work and improving productivity.
2Productivity
If minute sample-gripping means is used to grip and carry the sample, then bonding work is eliminated, but the attitude of the gripped sample becomes unstable and deviates from the original orientation
Solution Approach 1:
The invention applies markings to the sample before gripping it. These markings serve as reference marks that enable subsequent attitude control. By preparing the sample with reference marks in advance, the system can accurately control and reproduce the sample's original attitude after relocation, preventing orientation deviation.
Solution Approach 2:
The invention implements a feedback mechanism where the attitude of the gripped sample is detected by observing the reference marks, and the gripper's position is adjusted based on this detection to control the sample's attitude. This closed-loop feedback ensures the sample maintains its correct orientation despite being held by a mechanical gripper.
3Ease of operation
If the sample attitude is not controlled during relocation, then the operation is simple, but the sample orientation deviates from the original state requiring correction
Solution Approach 1:
The invention enables the sample to serve itself by using its own reference marks for attitude control. The markings applied to the sample act as self-identifying features that allow the system to automatically detect and correct the sample's attitude without requiring external intervention or complex correction procedures.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach allows for precise and stable attitude control of the sample during relocation, enabling accurate reproduction of the original orientation, thus facilitating efficient observation and additional working processes in transmission electron microscopes without relying on operator skill.
Implementation Method 1
a marking process applying a marking to a sample by a beam
Implementation Method 2
an attitude control process controlling an attitude of the sample while observing the marking applied to the sample
Data Source
AI summary
In a chamber of a charged particle beam apparatus, the sample on the sample substrate is gripped and carried to the sample holder, and there is controlled the attitude of the sample when the sample is fixed on the sample holder. There possesses a marking process applying, in the chamber, a marking to a surface of the sample Wb existing on the sample substrate by a beam, a carriage process gripping the sample by a sample gripping means and carrying it from the sample substrate to the sample holder, and an attitude control process controlling, when fixing the sample to the sample holder, the attitude of the sample while observing the marking applied to the surface of the sample.