Sample Carrier Gripping Design for Electrostatic Release
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Solution Overview
Problem
The manual removal of samples unintentionally retained on sample supports in inspection systems leads to significant downtime, contamination risk, and damage, necessitating a more efficient and less disruptive method.
Innovation Solution
A carrier with a gripping device configured to lift the sample away from the sample support, utilizing piezo-actuated gripping mechanisms and gecko pads to securely release the sample without manual intervention.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Strength
If an electrostatic clamp is used to secure the sample to the sample support, then the sample is held firmly in place during inspection, but the sample may not be completely released after inspection due to charge buildup
Solution Approach 1:
A carrier is introduced as an intermediary device between the sample support and the sample. The carrier includes a gripping device that can contact the sample and lift it away from the sample support, effectively mediating the release process and eliminating the problem of charge buildup preventing sample removal
Solution Approach 2:
The system is segmented into distinct functional components: the sample support with electrostatic clamp for holding, and the carrier with gripping device for release. This segmentation allows each component to perform its specific function optimally without interference from the other
2Ease of operation
If manual sample extraction is performed after inspection, then the retained sample can be retrieved, but significant downtime occurs and contamination or damage risk increases
Solution Approach 1:
The system performs sample release automatically through the carrier's gripping device, which can be actuated to lift the sample from the sample support without requiring manual intervention. This self-service capability eliminates the need for operator intervention, reducing downtime and contamination risk
Solution Approach 2:
The manual mechanical extraction process is replaced with an automated mechanical system using the carrier and gripping device. This substitution eliminates the harmful effects of manual intervention while maintaining the ability to retrieve retained samples
3Ease of operation
If the machine is returned to ambient conditions for manual sample retrieval, then the sample can be accessed, but the system becomes vulnerable to contamination and damage
Solution Approach 1:
The carrier serves as an intermediary that enables sample access while maintaining system integrity. The gripping device can operate within the vacuum environment to release the sample, eliminating the need to break vacuum and exposing the system to contamination
Solution Approach 2:
The automated gripping mechanism operates within the existing vacuum environment (inert atmosphere), allowing sample release without exposing the system to ambient conditions that could cause contamination or damage
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Reduces downtime to minutes from potential days, minimizing damage and contamination risks, and ensuring efficient sample retrieval.
Implementation Method 1
The gripping device may comprise a plurality of piezo-actuators
Implementation Method 2
utilizing piezo-actuated gripping mechanisms and gecko pads to securely release the sample
Data Source
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AI summary
The present invention provides a carrier comprising a carrier surface. The carrier surface is configured to face a first major surface of a sample. A second major surface of the sample, opposite the first major surface of the sample, is configured to contact a sample support. The carrier surface comprises a gripping device configured to contact the sample, and to lift the sample away from the sample support.