Sample Carrier Positioning Disturbance Compensation
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Solution Overview
Problem
Existing methods for compensating for disturbances in sample carrier positioning, such as thermal drift and expansion, are costly, time-consuming, or require sample-specific adaptations, and fail to maintain precise positioning over extended periods.
Innovation Solution
A method and device using multiple distance sensors on a sensor carrier to measure distances to opposite sides of a sample carrier along different axes, coupled with a piezoelectric positioner for real-time compensation, allowing for accurate positioning without sample-specific adaptations.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Stability of the object's composition
If structural measures such as low thermal expansion materials and symmetrical design are used, then positioning stability is improved, but device complexity and cost increase
Solution Approach 1:
The patent replaces complex mechanical stabilization structures with a simpler measurement and compensation system. Instead of using low thermal expansion materials and symmetrical mechanical designs, the invention uses capacitive sensors to detect position changes and electronically compensates for drift, substituting mechanical complexity with electrical measurement and control.
Solution Approach 2:
The patent introduces capacitive sensors as intermediary elements between the sample carrier and the measurement system. These sensors indirectly detect position changes through electrical field interactions, allowing stabilization without direct mechanical constraints or complex structural measures.
2Measurement precision
If additional sample markers and sensor systems are used for real-time correction, then positioning accuracy is improved, but measurement time increases
Solution Approach 1:
The patent makes the sample carrier itself multi-functional by equipping it with both the sample holding capability and the positioning reference capability through integrated capacitive sensors. This eliminates the need for separate markers and additional sensor systems, achieving real-time correction without extending measurement time.
Solution Approach 2:
The patent merges the sample carrier with the positioning reference system by integrating capacitive sensors directly onto the carrier. This combination allows simultaneous sample handling and position measurement, eliminating the time loss associated with separate marker systems and additional detection apparatus.
3Measurement precision
If post-processing correction methods are used, then positioning accuracy is improved, but the measurement no longer corresponds to the measurement task in real time
Solution Approach 1:
The patent implements real-time feedback by using capacitive sensors to continuously monitor position changes during measurement and immediately compensating for drift. This eliminates the need for post-processing correction, maintaining both high positioning accuracy and real-time measurement capability throughout the entire measurement process.
Solution Approach 2:
The patent performs preliminary positioning and drift compensation actions continuously during measurement rather than correcting afterward. The capacitive sensors detect position changes in real-time and trigger immediate compensation, ensuring the measurement always corresponds to the actual measurement task without requiring subsequent correction steps.
4Measurement precision
If laser interferometers are used to determine distance, then measurement precision is improved, but thermal expansion of the sample stage cannot be compensated
Solution Approach 1:
The patent replaces laser interferometer systems with capacitive sensor technology. While laser interferometers provide precise distance measurement, they cannot detect thermal expansion of the sample stage itself. Capacitive sensors directly measure the position of the sample carrier, inherently capturing thermal expansion effects and providing reliable compensation without requiring separate thermal measurements.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables precise, real-time compensation of thermal drift and expansion, maintaining high-precision positioning of the sample carrier relative to the sensor carrier, suitable for probe microscopy and other techniques.
Implementation Method 1
Positioning the sample holder relative to the sensor holder using a piezoelectric positioner
Data Source
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AI summary
The invention relates to a method for interference variable compensation during the positioning of a sample support (2), in particular during probe microscopy, said method comprising the following steps: measuring a distance (dx1) to a first side of the sample support (2) using a first distance sensor (X1) of a sensor support (3), and measuring a distance (dx2) to a second side of the sample support (2) opposite the first side using a second distance sensor (X2) of the sensor support (3), the distances (dx1, dx2) being determined substantially in parallel with a first axis (x); measuring a distance (dy1) to a third side of the sample support (2) using a third distance sensor (Y1) of the sensor support (3), and measuring a distance (dy2) to a fourth side of the sample support (2) opposite the third side using a fourth distance sensor (Y2) of the sensor support (3), the distances (dy1, dy2) being determined substantially in parallel with a second axis (y) different from the first axis (x); positioning the sample support (2) relative to the sensor support (3) using a piezopositioner (1). The invention also relates to a corresponding device (10).