Sample Characterization Device Using Localization Target for Nanometric Co-localization
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Solution Overview
Problem
Current characterization devices face challenges in achieving precise and repeatable co-localization of measurements at the nanometric scale, as they lack the ability to position measuring instruments absolutely relative to the sample, leading to difficulties in multimodal characterization and reproducibility across different measurement techniques and times.
Innovation Solution
A characterization device with a positioning system that uses a localization pattern engraved or printed on the sample, allowing for precise determination of the measuring instrument's position relative to the sample through image acquisition and analysis, enabling simultaneous positioning and measurement, and allowing for measurements at the same point over time, even if the sample has been moved.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a positioning system is used to position the measuring instrument relative to the sample, then measurement precision is improved, but the ability to achieve absolute positioning and co-localization across different instruments and times deteriorates
Solution Approach 1:
The patent introduces a localization target as an intermediary element that is attached to the sample and serves as a common reference for multiple measuring instruments. This target contains positioning patterns that enable different instruments to locate the same physical point on the sample, thereby achieving co-localization across instruments and time without requiring direct repositioning accuracy between instruments.
Solution Approach 2:
The patent creates a reference copy of the sample's position information through the localization target. The positioning patterns on the target provide a reproducible reference that can be read by different instruments, effectively copying the position information in a form that is accessible to multiple measurement systems and enabling repeatable measurements at the same location.
2Adaptability or versatility
If different measuring instruments are used for multimodal characterization, then characterization capability is improved, but the difficulty of detecting and measuring the same location deteriorates
Solution Approach 1:
The localization target is designed with positioning patterns that serve as a universal reference for multiple types of measuring instruments. The same target can be used with optical microscopes, electron microscopes, and other characterization tools, providing a common language for position identification across different measurement modalities and eliminating the need for instrument-specific positioning procedures.
3Ease of operation
If the sample is moved between measurements, then operational flexibility is improved, but measurement repeatability deteriorates
Solution Approach 1:
The localization target is attached to the sample in advance, creating a permanent reference framework that travels with the sample. This preliminary action ensures that even when the sample is moved between measurements or between instruments, the positioning patterns remain in fixed positions relative to the sample features, allowing for accurate re-localization without requiring the sample to remain in its original position.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables precise and repeatable co-localization of measurements at the nanometric scale, facilitating multimodal characterization by ensuring accurate positioning of measuring instruments relative to the sample, thereby improving the reproducibility and compatibility of different measurement techniques.
Implementation Method 1
means for acquiring, by means of said optical imaging system, an image of at least a part of said localization target
Data Source
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AI summary
The invention relates to a device (10) for characterizing a sample (11), comprising a measuring instrument (20) suitable for determining a physical characteristic of the sample at one point thereof. More specifically, the characterization device of the invention comprises a positioning system (30) suitable for positioning the measuring instrument in relation to the sample, in order to obtain a measurement at a measurement point localized on the sample, in an absolute manner. For this purpose, the invention provides a characterization device including a positioning system that comprises: a locating target (31) solidly connected to the sample and defining a reference system linked to the sample; means for acquiring and analysing images, comprising lighting means (321) for illuminating the locating target, an optical imaging system (322) solidly connected to the measuring instrument and suitable for acquiring an image (31P) of at least one portion of the locating target, and image analysis means (33) suitable for analysing the image of the portion of the locating target in order to determine the position and orientation of the optical imaging system in relation to the locating target; calibration means (34, 34A) for determining the relative position of the measuring instrument in relation to the optical imaging system; and processing means (13) for processing the results of the image analysis and of the calibration, suitable for determining the absolute position of the localized measurement point in the reference system linked to the sample, the measuring instrument being positioned to take the measurement at said localized measurement point and the physical characteristic of the sample being determined by the measuring instrument at the localized measurement point.