Sample Characterization Device Using Localization Target for Nanometric Co-localization

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Solution Overview

Problem

Current characterization devices face challenges in achieving precise and repeatable co-localization of measurements at the nanometric scale, as they lack the ability to position measuring instruments absolutely relative to the sample, leading to difficulties in multimodal characterization and reproducibility across different measurement techniques and times.

Innovation Solution

A characterization device with a positioning system that uses a localization pattern engraved or printed on the sample, allowing for precise determination of the measuring instrument's position relative to the sample through image acquisition and analysis, enabling simultaneous positioning and measurement, and allowing for measurements at the same point over time, even if the sample has been moved.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If a positioning system is used to position the measuring instrument relative to the sample, then measurement precision is improved, but the ability to achieve absolute positioning and co-localization across different instruments and times deteriorates

Engineering Contradiction:
Improvepositioning precisionVSAvoidrepeatability of measurements
Core Design Contradiction:
Measurement precisionVSReliability

Solution Approach 1:

The patent introduces a localization target as an intermediary element that is attached to the sample and serves as a common reference for multiple measuring instruments. This target contains positioning patterns that enable different instruments to locate the same physical point on the sample, thereby achieving co-localization across instruments and time without requiring direct repositioning accuracy between instruments.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent creates a reference copy of the sample's position information through the localization target. The positioning patterns on the target provide a reproducible reference that can be read by different instruments, effectively copying the position information in a form that is accessible to multiple measurement systems and enabling repeatable measurements at the same location.

Inventive Principle:
Principle #26Copying

2Adaptability or versatility

If different measuring instruments are used for multimodal characterization, then characterization capability is improved, but the difficulty of detecting and measuring the same location deteriorates

Engineering Contradiction:
Improvemultimodal characterization capabilityVSAvoidco-localization difficulty
Core Design Contradiction:
Adaptability or versatilityVSDifficulty of detecting and measuring

Solution Approach 1:

The localization target is designed with positioning patterns that serve as a universal reference for multiple types of measuring instruments. The same target can be used with optical microscopes, electron microscopes, and other characterization tools, providing a common language for position identification across different measurement modalities and eliminating the need for instrument-specific positioning procedures.

Inventive Principle:
Principle #6Universality (Multi-functionality)

3Ease of operation

If the sample is moved between measurements, then operational flexibility is improved, but measurement repeatability deteriorates

Engineering Contradiction:
Improveoperational flexibilityVSAvoidmeasurement repeatability
Core Design Contradiction:
Ease of operationVSReliability

Solution Approach 1:

The localization target is attached to the sample in advance, creating a permanent reference framework that travels with the sample. This preliminary action ensures that even when the sample is moved between measurements or between instruments, the positioning patterns remain in fixed positions relative to the sample features, allowing for accurate re-localization without requiring the sample to remain in its original position.

Inventive Principle:
Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables precise and repeatable co-localization of measurements at the nanometric scale, facilitating multimodal characterization by ensuring accurate positioning of measuring instruments relative to the sample, thereby improving the reproducibility and compatibility of different measurement techniques.

Implementation Method 1

means for acquiring, by means of said optical imaging system, an image of at least a part of said localization target

Methodology Applied
Scientific EffectOptical imaging: Photography

Data Source

PatentEP2877863B1Device and method for the characterisation of a sample by localised measures
Publication Date: 2021.10.27 HORIBA FRANCE SAS
  • EP2877863B1 patent drawingFigure 1~2
  • EP2877863B1 patent drawingFigure 3~4
  • EP2877863B1 patent drawingFigure 5~8

AI summary

The invention relates to a device (10) for characterizing a sample (11), comprising a measuring instrument (20) suitable for determining a physical characteristic of the sample at one point thereof. More specifically, the characterization device of the invention comprises a positioning system (30) suitable for positioning the measuring instrument in relation to the sample, in order to obtain a measurement at a measurement point localized on the sample, in an absolute manner. For this purpose, the invention provides a characterization device including a positioning system that comprises: a locating target (31) solidly connected to the sample and defining a reference system linked to the sample; means for acquiring and analysing images, comprising lighting means (321) for illuminating the locating target, an optical imaging system (322) solidly connected to the measuring instrument and suitable for acquiring an image (31P) of at least one portion of the locating target, and image analysis means (33) suitable for analysing the image of the portion of the locating target in order to determine the position and orientation of the optical imaging system in relation to the locating target; calibration means (34, 34A) for determining the relative position of the measuring instrument in relation to the optical imaging system; and processing means (13) for processing the results of the image analysis and of the calibration, suitable for determining the absolute position of the localized measurement point in the reference system linked to the sample, the measuring instrument being positioned to take the measurement at said localized measurement point and the physical characteristic of the sample being determined by the measuring instrument at the localized measurement point.