Multi-Channel Sample Chip Focusing for Warpage-Corrected Particle Counting
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Solution Overview
Problem
Existing fine particle counting methods using multi-channel sample chips face challenges such as warpage during manufacturing, leading to inconsistent focal distances, prolonged image acquisition times, and sample drying due to small sample volumes, resulting in measurement errors.
Innovation Solution
A method and apparatus using a multi-channel sample chip with focusing marks to correct warpage by calculating a warpage correction value between adjacent focus values, allowing quick image acquisition and accurate particle counting through auto and manual focus control, and employing topology mapping to predict focus values for remaining channels.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the sample chip size is increased to accommodate multiple channels for observing multiple samples, then the productivity is improved, but the manufacturing precision deteriorates due to warpage occurrence
Solution Approach 1:
The patent applies preliminary action by pre-measuring focus values at multiple positions on the sample chip before actual particle counting. These pre-measured focus values are used to calculate warpage correction values in advance, which are then stored and applied during the counting process. This preliminary measurement and correction value calculation eliminates the need for real-time warpage compensation during particle counting, thereby maintaining both high productivity and manufacturing precision.
2Productivity
If the sample chip size is increased to accommodate multiple channels, then the productivity is improved, but the measurement precision deteriorates due to inconsistent focal distances
Solution Approach 1:
The patent applies local quality by measuring and correcting focus values at multiple local positions on the sample chip. Instead of using a single global focus value, the system measures focus values at each channel position and calculates position-specific warpage correction values. This localized approach ensures that each channel maintains accurate focus despite variations in chip flatness across different regions, thereby preserving measurement precision while enabling multi-channel observation.
3Measurement precision
If automatic focus adjustment is performed for each channel to correct warpage, then the measurement precision is improved, but the time required for image acquisition increases
Solution Approach 1:
The patent applies preliminary action by pre-measuring focus values at multiple positions and calculating warpage correction values before actual particle counting. These correction values are stored and automatically applied during the counting process, eliminating the need for time-consuming real-time focus adjustment for each channel. This approach maintains measurement precision while significantly reducing image acquisition time.
4Loss of substance
If a small amount of sample (10 μl) is injected into each channel to save resources, then the loss of substance is reduced, but the reliability deteriorates due to sample drying
Solution Approach 1:
The patent applies the skipping principle by rapidly acquiring images of all channels using the pre-calculated warpage correction values. This rapid imaging process completes the observation of all samples before the small volume samples (10 μl per channel) can dry out. The system skips the time period during which drying could occur by efficiently capturing all necessary images in quick succession, thereby maintaining reliability despite using minimal sample volumes.
Data Source
AI summary
In a fine particle counting method using a multi-channel sample chip and a fine particle counting apparatus implementing the method, a plurality of samples is observable in a short period of time and even when warpage occurs during a manufacturing process as a sample chip becomes larger, the warpage is corrected so as to count fine particles accurately. Problems that a focal distance of each channel is not constant due to warpage occurring in a chip having a plurality of channels, and thus it takes a lot of time to obtain an image by obtaining a focus value for each channel may be solved. A problem that since an amount of sample injected into each channel is small, a sample dries out when an image is not quickly obtained and used for counting, thereby causing the occurrence of measurement error may be prevented.