Sample Holder Alignment Marks for Multi-Device Precision
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Solution Overview
Problem
Existing sample holder technologies face challenges in precisely aligning optical axes between different measurement devices, such as SEM and optical microscopes, leading to errors in positional alignment and limited capability to perform measurements beyond SEM and optical microscopy, requiring complex multi-device setups.
Innovation Solution
A sample holder with alignment marks at multiple positions on its surface, allowing precise position alignment using these marks across various measurement devices, and a sample-retaining portion that maintains a predetermined height difference between the marks and the sample surface, enabling high-precision measurements without the need for refocusing.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If a tiling mechanism is used to change the direction of the sample, then the sample surface can be disposed perpendicular to multiple measurement device axes, but precise alignment of optical axes between different measurement devices becomes difficult to achieve
Solution Approach 1:
The patent introduces alignment marks as intermediary reference elements that are detectable by multiple measurement devices. These marks serve as a common reference framework that mediates between different measurement devices with different optical axes, enabling precise positional alignment without requiring the optical axes to be perfectly crossed. The alignment marks provide a stable reference that resolves the alignment difficulty between SEM and optical microscope focal points.
Solution Approach 2:
The alignment marks are designed to be detectable by multiple types of measurement devices (SEM, optical microscope, etc.), making them a universal reference system. This multi-functionality allows different measurement devices to share a common alignment reference, enabling them to accurately locate and measure the same sample position despite having different optical axes and focal points.
2Adaptability or versatility
If a complex measurement device combining multiple measurement devices is used, then various measurements can be performed on a sample, but the device complexity increases
Solution Approach 1:
The alignment marks act as an intermediary that enables coordination between multiple measurement devices without requiring them to be physically integrated into a single complex device. Each device can independently detect the alignment marks and use them for positioning, allowing separate devices to work together seamlessly. This approach achieves multi-measurement capability while avoiding the complexity of integrating multiple devices into one system.
3Ease of operation
If alignment marks are placed on the sample holder surface at a predetermined height difference from the sample, then refocusing is unnecessary for observing the sample surface after detecting the marks, but the height difference must be precisely controlled
Solution Approach 1:
The patent optimizes the height difference parameter between alignment marks and sample surface to fall within the focal depth range of the measurement devices. By carefully selecting this parameter, the system achieves a state where both the alignment marks and sample surface remain within the acceptable focus range, eliminating the need for refocusing while maintaining ease of operation. This parameter optimization balances operational simplicity with manufacturing precision requirements.
Data Source
AI summary
Disclosed herein is a sample holder which holds a sample such that a surface is exposed and can be mounted in each of multiple measurement devices that perform measurement based on different measurement principles so that properties of the sample can be measured by each of the measurement devices. The sample holder includes: a main body that surrounds the sample; alignment marks that are arranged at each of two or more different positions in a surface of the main body and can be detected by the measurement devices; and a sample-retaining portion that is disposed within the main body and retains the sample such that a height difference between a mark surface of the alignment mark and the surface of the sample is set to a predetermined value.