Sample Holder Cartridge Tilted Surface Rotary Drive Alignment

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Solution Overview

Problem

In charged particle beam systems, such as transmission electron microscopes, sample holders with cantilevered support mechanisms often result in positional deviations of the cartridge, leading to defocusing issues due to heightwise misalignment.

Innovation Solution

A sample holder design featuring a cartridge with opposing tilted surfaces and a rotary drive mechanism, comprising resilient members, that imparts a rotary force to the cartridge, ensuring it is securely pushed against the holder base, reducing positional deviations by providing dual-point support.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If the cartridge is supported in a cantilevered manner, then the structure is simple and easy to manufacture, but the cartridge may deviate in the heightwise direction causing defocusing

Engineering Contradiction:
Improveease of manufactureVSAvoidpositional accuracy
Core Design Contradiction:
Ease of manufactureVSManufacturing precision

Solution Approach 1:

The support structure is divided into multiple independent support portions (first support portion, second support portion, third support portion) distributed around the cartridge. This segmentation allows each support to independently maintain the cartridge's positional accuracy without requiring complex interconnections, resolving the contradiction between structural simplicity and positioning precision.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Different regions of the holder base are provided with different types of support portions tailored to specific local needs. The first support portion provides primary support, while the second and third support portions provide additional stabilization at critical locations. This localized differentiation ensures high positional accuracy without unnecessarily complicating the overall structure.

Inventive Principle:
Principle #3Local quality

2Device complexity

If the cartridge is supported in a cantilevered manner, then the device complexity is reduced, but the stability of the cartridge position deteriorates

Engineering Contradiction:
Improvedevice complexityVSAvoidpositional stability
Core Design Contradiction:
Device complexityVSStability of the object's composition

Solution Approach 1:

The support system is segmented into multiple independent support portions (first, second, and third support portions) that collectively stabilize the cartridge. This segmentation approach maintains relative structural simplicity while significantly improving positional stability through distributed support, avoiding the need for complex interconnected mechanisms.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The support structure utilizes three-dimensional spatial distribution of support portions around the cartridge, transitioning from a single-plane or point support to a multi-dimensional support network. This dimensional expansion provides enhanced stability without proportionally increasing device complexity, as each support portion remains a relatively simple structural element.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This design significantly reduces positional deviations of the cartridge in the heightwise direction, minimizing defocusing and enhancing the stability of the sample stage within the charged particle beam system.

Implementation Method 1

a rotary drive mechanism for imparting a rotary force to the cartridge. As the rotary drive mechanism imparts a rotary force to the cartridge, the opposing first tilted surface of the cartridge is pushed against the first tilted surface of the mounting portion

Methodology Applied
Scientific EffectRotary force: Torque

Data Source

PatentUS11640895B2Sample holder and charged particle beam system
Publication Date: 2023.05.02 JEOL LTD
  • US11640895B2 patent drawing
  • US11640895B2 patent drawing
  • US11640895B2 patent drawing

AI summary

There is provided a sample holder capable of reducing positional deviation of a cartridge in the heightwise direction of a sample. The sample holder includes the cartridge and a holder base having a mounting portion for the cartridge. The mounting portion includes a placement surface, a first tilted surface, and a rotary drive mechanism for imparting a rotary force to the cartridge. The cartridge includes an opposing first tilted surface opposite to the first tilted surface of the mounting portion. As the rotary drive mechanism imparts the rotary force to the cartridge, the first tilted surface of the cartridge is pressed against the first tilted surface of the mounting portion, whereby the cartridge is pressed against the placement surface.