Sample Holder Groove Design for Thermal Stress Dispersion
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Solution Overview
Problem
Sample holders used in semiconductor fabrication processes face issues with heat-generating resistors peeling off due to thermal stress, which affects the durability and reliability of the holding mechanism.
Innovation Solution
A sample holder design featuring a ceramic body with a heat-generating resistor on one surface and lattice-like grooves on the resistor's surface, where the grooves have different extending directions, disperses thermal stress and reduces the likelihood of peeling by distributing it evenly across the surface.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If a heat-generating resistor is disposed on a ceramic body, then heating function is achieved, but thermal stress causes the resistor to peel off
Solution Approach 1:
The surface of the heat-generating resistor is segmented into multiple regions by forming grooves that divide the surface into a grid pattern. This segmentation allows thermal stress to be distributed across multiple smaller areas rather than concentrating on the entire surface, preventing peeling while maintaining the heating function.
Solution Approach 2:
Different portions of the resistor surface have different groove extending directions, creating local variations in stress distribution patterns. This local quality variation ensures that thermal stress is dispersed in multiple directions across different regions of the resistor surface, enhancing attachment reliability.
2Reliability
If the heat-generating resistor surface is made uneven, then thermal stress is dispersed, but manufacturing complexity increases
Solution Approach 1:
The uneven surface is created by adding a grid pattern of grooves to the otherwise flat resistor surface. This segmented approach to creating surface unevenness is simpler to manufacture than completely irregular surfaces, as the grooves can be formed using standard photolithography and etching processes.
Solution Approach 2:
The grooves create controlled curvature and unevenness on the resistor surface through their grid pattern. This geometric approach to surface modification achieves thermal stress dispersion through well-defined curved surfaces that can be precisely manufactured using conventional semiconductor fabrication techniques.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design enhances the durability of the sample holder by reducing the concentration of thermal stress and preventing peeling, thereby maintaining the soaking property and improving the overall reliability of the holding mechanism.
Implementation Method 1
a heat-generating resistor disposed on an other main surface of the ceramic body
Implementation Method 2
thermal stress generated by a thermal expansion difference between the insulating substrate and the heat-generating resistor
Data Source
AI summary
A sample holder includes: a ceramic body including a one main surface, and a sample holding surface on the one main surface; a heat-generating resistor disposed on an other main surface of the ceramic body; and a plurality of grooves arranged in a lattice on a surface of the heat-generating resistor, the plurality of grooves having extending directions that are different on different portions of the surface of the heat-generating resistor.