Sample Holder Retarding Field for Auger Electron Spectroscopy

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Solution Overview

Problem

Existing annular-acceptance analyzer systems face challenges in reducing electron energy without incurring the disadvantages of using grids, such as transmission loss, scattering, aberrations, and contamination issues.

Innovation Solution

A sample holder apparatus with a grounded sample aperture member and an electrically isolated sample support member applies a positive bias potential, creating a retarding field that reduces electron energy without grids, modifying electron trajectories to enter the analyzer with desired angles.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If retarding grids are used to reduce electron energy, then energy resolution is improved, but transmission is reduced due to grid transparency limitations and scattering

Engineering Contradiction:
Improveenergy resolutionVSAvoidelectron transmission
Core Design Contradiction:
Measurement precisionVSQuantity of substance

Solution Approach 1:

The patent removes the retarding grids from the electron path entirely, extracting the problematic component that caused transmission loss and scattering. Instead of using grids to retard electrons, the invention applies a positive bias potential directly to the sample holder, eliminating the intermediate grid structure that was depleting the electron signal.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The patent introduces a positive bias potential applied to the sample holder as an intermediary mechanism to retard electrons. This electric field mediator reduces electron energy without requiring physical grids, thereby maintaining high transmission while achieving the desired energy reduction for improved resolution.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Measurement precision

If retarding grids are used to reduce electron energy, then energy resolution is improved, but scattering increases reducing transmission

Engineering Contradiction:
Improveenergy resolutionVSAvoidelectron scattering
Core Design Contradiction:
Measurement precisionVSObject-generated harmful factors

Solution Approach 1:

The patent removes the retarding grids that were causing electron scattering through their mesh structure. By eliminating the grid physical structure entirely and using a continuous electric field from the biased sample holder, the harmful scattering effect is removed while maintaining the energy reduction benefit.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The patent replaces the mechanical grid structure with an electric field-based retarding mechanism. Instead of electrons passing through physical mesh that causes scattering, the invention uses an electric potential field applied to the sample holder to retard electrons, eliminating mechanical scattering while achieving energy reduction.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

3Measurement precision

If retarding grids are used to reduce electron energy, then energy resolution is improved, but aberrations are introduced due to non-sphericity and non-concentricity

Engineering Contradiction:
Improveenergy resolutionVSAvoidanalyzer aberrations
Core Design Contradiction:
Measurement precisionVSManufacturing precision

Solution Approach 1:

The patent removes the complex multi-component retarding grid assembly that required precise spherical and concentric alignment. By eliminating this complex structure and using a simple biased sample holder, the patent avoids introducing manufacturing and alignment aberrations while still achieving energy reduction.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

Instead of placing retarding elements before the analyzer (as in traditional grid systems), the patent applies the retarding potential at the source (sample holder). This inversion of the retarding mechanism location simplifies the system and eliminates the need for complex grid assemblies that introduce aberrations.

Inventive Principle:
Principle #13The other way round (Inversion)

4Measurement precision

If retarding grids are used to reduce electron energy, then energy resolution is improved, but grid contamination occurs requiring replacement

Engineering Contradiction:
Improveenergy resolutionVSAvoidgrid contamination and replacement
Core Design Contradiction:
Measurement precisionVSReliability

Solution Approach 1:

The patent removes the retarding grids that were susceptible to contamination from the electron path. By eliminating the grid structure and using a biased sample holder instead, there is no grid surface to accumulate contamination, thereby improving system reliability and eliminating replacement requirements.

Inventive Principle:
Principle #2Taking out (Extraction)

5Measurement precision

If retarding grids are used to reduce electron energy, then energy resolution is improved, but device complexity increases due to floating requirements

Engineering Contradiction:
Improveenergy resolutionVSAvoidelectrical floating requirements
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent removes the complex electrical floating requirements associated with traditional retarding grid systems. By eliminating the grids and using a simple biased sample holder, the patent simplifies the electrical configuration while maintaining the energy reduction function.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The biased sample holder performs multiple functions: it holds the sample, provides electrical bias for retarding electrons, and serves as the retarding mechanism itself. This multi-functionality eliminates the need for separate retarding grid components and their associated floating electrical requirements, simplifying the overall device.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enhances energy resolution and sensitivity of Auger electron spectroscopy by reducing electron energy without affecting transmission or introducing aberrations, allowing for higher energy transitions to be analyzed within the existing analyzer range.

Implementation Method 1

The combination of the grounded sample aperture member along with the positive bias potential applied to the sample support member and electrically connected sample produces an electrical retarding field that reduces the energy of the electrons before they enter the analyzer

Methodology Applied
Scientific EffectElectrical retarding field: Electric Field

Implementation Method 2

due to the shape of the field, which is substantially planar near the sample surface and substantially spherical farther from the sample surface, the trajectories of said electrons are bent outward from the optical axis such that they fill the entrance to the analyzer

Methodology Applied
Scientific EffectElectron trajectory bending: Lorentz Force

Data Source

PatentUS8071942B2Sample holder apparatus to reduce energy of electrons in an analyzer system and method
Publication Date: 2011.12.06 PHYSICAL ELECTRONICS USA
  • US8071942B2 patent drawing
  • US8071942B2 patent drawing
  • US8071942B2 patent drawing

AI summary

A sample holder apparatus and method for reducing the energy of charged particles entering an annular-acceptance analyzer includes use of an electrically isolated sample support member having a sample receiving surface configured to receive a sample and electrically connect the sample to the sample support member (e.g., wherein the sample support member is configured for application of a retarding bias potential). A grounded sample aperture member defining an aperture relative to the sample support member but electrically isolated therefrom is provided such that the aperture is proximate the sample receiving surface to expose at least a portion of a surface of a sample received thereon to be analyzed (e.g., wherein applying a retarding bias potential to the sample support member produces an electrical retarding field about the aperture that reduces the energy of emitted particles from a sample before they enter an annular-acceptance analyzer).