Sample Holder Sealing Structure for Leak-Free Liquid Beam Observation
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Solution Overview
Problem
Existing sample holders for charged particle beam devices face challenges in reliably holding liquid or gel samples without leakage, ensuring non-invasive observation, and maintaining the integrity of high-viscosity gel samples during observation.
Innovation Solution
A sample holder design comprising a first member with a lid and a first chip, and a second member with a base, an electrode, and a second chip, where the first chip has a conductive thin film and insulating thin film window, and the second chip has an insulating thin film window, with seal materials to maintain airtightness and prevent sample leakage.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a liquid or gel sample is held between insulating thin films in a sample holder, then non-invasive observation of the sample is enabled, but sample leakage occurs compromising observation reliability
Solution Approach 1:
The sample holder is divided into separate first and second members with distinct functions. The first member holds the first chip with conductive thin film, while the second member holds the second chip with insulating thin film and the electrode. This segmentation allows independent optimization of each component's sealing and holding capabilities, preventing sample leakage while maintaining non-invasive observation.
Solution Approach 2:
A seal material is introduced as an intermediary component between the first and second members to create an airtight seal. This seal material prevents sample leakage from the space between the chips while allowing the electrical signal to pass through the insulating thin film to the electrode, thus maintaining both sealing reliability and signal detection capability.
2Measurement precision
If the conductive thin film and lid member are made electrically conductive, then electron beam irradiation can be properly controlled, but electrical leakage may occur compromising measurement precision
Solution Approach 1:
Different electrical conductivity properties are assigned to different regions of the sample holder. The lid member and conductive thin film are made electrically conductive to control electron beam irradiation and create potential changes. The insulating thin film and seal material are made electrically insulating to prevent electrical leakage paths. This local differentiation of electrical properties enables precise potential change signal detection while preventing harmful electrical leakage.
Solution Approach 2:
The insulating thin film acts as an electrical intermediary between the conductive thin film and the electrode. It allows the potential change signal to pass through while preventing direct electrical contact and leakage paths. The seal material further mediates by providing both mechanical sealing and electrical insulation, ensuring that electrical signals are detected accurately without leakage.
3Reliability
If high-viscosity gel samples are introduced between insulating thin films, then non-invasive observation is enabled, but the sample structure may be damaged during introduction
Solution Approach 1:
The first and second chips are prepared with their respective thin films and sealing structures before the gel sample is introduced. The seal material is pre-positioned to create a controlled environment. This preliminary preparation allows the high-viscosity gel sample to be introduced without requiring complex manipulation that could damage its structure, while still enabling non-invasive observation.
Solution Approach 2:
Thin insulating films are used to enclose the gel sample without requiring rigid containers. These flexible thin films can accommodate the high-viscosity gel's properties during introduction while maintaining sample integrity. The films are thin enough to allow electrical signal transmission for observation but sufficient to protect the sample structure during the introduction process.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The sample holder effectively holds liquid or gel samples, preventing leakage and ensuring non-invasive observation, thereby improving the yield of charged particle beam device observations.
Implementation Method 1
a region inside the first seal material is maintained airtightly from a region outside the first seal material by the first member and the second member being combined and the first seal material being crushed between the first bottom seal surface and an upper seal surface of the lid member
Implementation Method 2
the conductive thin film of the first chip and the metal of the lid member are electrically conductive
Implementation Method 3
an electron beam is emitted from the conductive thin film side with a ground potential or a predetermined bias voltage applied to the conductive thin film. The electron beam irradiation results in a local change in potential on the one main surface of the first insulating thin film
Implementation Method 4
water has a high relative permittivity of approximately 80 and propagates the signal well whereas a biological sample has a low relative permittivity of approximately 2 to 3 and a low signal propagation force
Data Source
AI summary
A sample holder reliably holds a liquid or gel sample, and the yield of observation with a charged particle beam device is improved. A sample holder 101 includes a first member 102 that has a lid member 111 and a first chip 105 provided with a first window 123 where a laminated film including a first insulating thin film 104 is formed, and a second member 103 that has a base material 127 having a first bottom seal surface 203 and a second bottom seal surface 200, an electrode 108 disposed on the base material, and a second chip 107 provided with a second window 124 where a second insulating thin film 106 is formed and held on the second bottom seal surface via a second seal material 119 such that the second window faces the electrode, in which a region inside a first seal material is maintained airtightly from a region outside the first seal material by the first member and the second member being combined and the first seal material being crushed between the first bottom seal surface and an upper seal surface of the lid member.