Sample Holding Mechanism for Thermal Drift Compensation

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Solution Overview

Problem

Existing sample holding mechanisms for sheet-like samples, such as photomasks, face challenges in maintaining precise positioning due to thermal expansion and contraction, which leads to sample drift and inaccurate working or observation, especially when handling samples of varying sizes.

Innovation Solution

A sample holding mechanism with a detachable base and multi-point support system, including a rotation support, slide support, and butting support, allows the sample holder to freely deform with temperature changes, ensuring the sample remains precisely positioned through X-direction and Y-direction positioning members, enabling precise positioning and observation without the need for thermal equilibration.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Device complexity

If a standardized carrying system is used, then the device complexity is reduced, but it cannot accommodate samples of various sizes

Engineering Contradiction:

Improvecarrying system complexityVSAvoidsample size adaptability

Core Design Contradiction:

Device complexityVSAdaptability or versatility

Solution Approach 1:

The sample holder is designed with a universal structure that can accommodate samples of various sizes through adjustable positioning members. The holder includes X-direction and Y-direction positioning members that can be adjusted to fit different sample dimensions, allowing a single holder design to serve multiple sample sizes without requiring multiple specialized holders.

Inventive Principle:

Principle #6Universality (Multi-functionality)

2Stability of the object's composition

If a high rigidity sample holder is used to prevent sample flexure, then the sample positioning stability is improved, but the thermal expansion coefficient increases causing large distortion

Engineering Contradiction:

Improvesample positioning stabilityVSAvoidthermal expansion distortion

Core Design Contradiction:

Stability of the object's compositionVSObject-affected harmful factors

Solution Approach 1:

The positioning members are designed to change their position parameters in response to thermal expansion. When the sample holder expands due to temperature changes, the positioning members slide along guide rails rather than maintaining fixed positions, allowing the system to accommodate thermal distortion while still maintaining sample positioning stability.

Inventive Principle:

Principle #35Parameter changes

3Strength

If a high heat capacity sample holder is used to maintain structural integrity, then the mechanical strength is improved, but the thermal equilibration time increases

Engineering Contradiction:

Improvesample holder strengthVSAvoidthermal equilibration time

Core Design Contradiction:

StrengthVSLoss of time

Solution Approach 1:

The sample holder is segmented into multiple components with different thermal masses. The positioning members are separated from the main holder body and can be made of materials with lower heat capacity. This segmentation allows the critical positioning components to reach thermal equilibrium quickly while the main holder structure maintains its mechanical strength.

Inventive Principle:

Principle #1Segmentation

4Productivity

If temperature adjustment is made only during pre-alignment, then the process time is reduced, but the high heat capacity sample holder cannot be thermally equilibrated

Engineering Contradiction:

Improvepre-alignment efficiencyVSAvoidsample holder thermal equilibrium

Core Design Contradiction:

ProductivityVSTemperature

Solution Approach 1:

The positioning system transitions from a static fixed-position design to a dynamic sliding design that actively adapts to temperature changes. The positioning members can slide along the guide rails during the observation and working processes, dynamically compensating for thermal expansion without requiring additional thermal equilibration steps.

Inventive Principle:

Principle #15Dynamics

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The mechanism effectively maintains sample position stability across temperature changes, eliminating the need for thermal equilibration and allowing precise working and observation, even with large or varying-sized samples, while minimizing space and time requirements.

Implementation Method 1

the distortion caused by the temperature change is large. Further, since the heat capacity is large, time is required for the sample holder to become thermally equilibratory with the ambient temperature environment. Therefore, like JP-A-2005-32906, even if the temperature adjustment was made only during the process for pre-aligning, the high heat capacity sample holder cannot be thermally equilibrated.

Methodology Applied