Sample Inclination Mechanism Without Sliding Pivot for Beam Positioning
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Solution Overview
Problem
The existing charged particle beam devices face reduced positioning accuracy due to nonlinear characteristics, backlash, and frictional forces generated in the inclination mechanism, primarily caused by the presence of a sliding portion of a rotation shaft.
Innovation Solution
The implementation of an inclination mechanism that eliminates the sliding portion by using a load transmission unit and deformation units to transmit and generate torque, allowing the sample holding unit to rotate elastically without a sliding shaft, thereby reducing nonlinear characteristics.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If a sliding portion (pivot) is used in the inclination mechanism, then the mechanism can achieve rotation and inclination function, but nonlinear characteristics (backlash, friction, nonlinear gain) reduce positioning accuracy
Solution Approach 1:
The invention extracts and eliminates the sliding portion (pivot) from the inclination mechanism. By removing this problematic component, the mechanism achieves inclination functionality through elastic deformation of the support shaft instead, thereby eliminating the source of nonlinear characteristics while maintaining the essential rotation capability
Solution Approach 2:
The invention replaces the traditional mechanical sliding system (pivot-based rotation) with an elastic deformation system. The support shaft utilizes elastic deformation to achieve rotational movement, substituting the sliding mechanical interface with an elastic mechanical response that avoids backlash and friction
2Adaptability or versatility
If a pivot-based rotation mechanism is used, then the sample can be inclined, but frictional forces and backlash reduce positioning accuracy
Solution Approach 1:
The invention extracts and eliminates the pivot component from the system. By removing this friction-generating element, the inclination operation is achieved through elastic deformation of the support shaft, which eliminates backlash and frictional forces while maintaining the ability to incline the sample
Solution Approach 2:
The invention changes the mechanical parameter from sliding friction to elastic deformation. By transitioning from a pivot-based sliding mechanism to an elastic deformation mechanism, the system eliminates frictional forces and backlash, achieving precise positioning through controlled elastic response
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enhances the positioning accuracy of the sample inclination operation by eliminating the sliding portion of the rotation shaft, resulting in reduced nonlinear characteristics and improved mechanical stability.
Implementation Method 1
a first deformation unit, a second deformation unit, a third deformation unit, and a fourth deformation unit configured to be elastically deformed by the load
Data Source
AI summary
A charged particle beam device includes: an inclination mechanism driving unit configured to generate a driving force; an inclination driving force transmission unit configured to transmit the driving force; and an inclination mechanism unit having first and second load transmission units, first, second and third deformation units, and an inclinable sample holding unit. The first load transmission unit moves in a load direction by the load from the inclination driving force transmission unit and transmits the load to the first deformation unit. The second load transmission unit rotates about the second deformation unit as a fulcrum by a torque generated by deformation of the first deformation unit and transmits the load to the third deformation unit. The sample holding unit rotates about the fourth deformation unit as a fulcrum opposite to a direction of the second load transmission unit by a torque generated by deformation of the third deformation unit.