Sample Milling Camera Alignment for Swing Axis Traceability
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Solution Overview
Problem
In sample milling apparatuses, accurately determining whether the distance between the swing axis and the ion beam impact point exceeds a tolerable range is challenging, leading to difficulties in precisely judging the timing of milling completion and maintaining the milling position within the field of view, especially when the positioning camera's adjustment is performed.
Innovation Solution
The method involves using a positioning camera to observe the trace of the ion beam while held relative to the swing axis, extracting a display image to bring the ion beam impact point and the field of view into coincidence, allowing easy identification of the swing axis position and determining if the distance between the swing axis and the ion beam impact point is within tolerable limits.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the positioning camera position is mechanically adjusted to bring the beam impact point into coincidence with the field of view center, then the positioning accuracy is improved, but the ability to trace the swing axis position is lost
Solution Approach 1:
The patent creates a virtual copy of the swing axis position information by detecting the swing axis before camera adjustment and storing its coordinates. This virtual representation allows the system to recover and display swing axis position information after the camera has been mechanically adjusted, resolving the contradiction between improving positioning accuracy and preserving swing axis traceability
Solution Approach 2:
The patent introduces an intermediary computational process that calculates the relationship between the swing axis position and the adjusted camera field of view. By computing offset values and using these as intermediaries, the system can map the swing axis position to the new camera coordinate system, maintaining information about the swing axis even after mechanical adjustment
2Ease of operation
If the distance between the swing axis and beam impact point exceeds tolerable range, then the milling position may deviate from the field of view, but adjusting the camera position makes it impossible to judge whether the distance is within tolerable range
Solution Approach 1:
The patent implements a feedback mechanism that calculates the distance between the swing axis and beam impact point based on stored swing axis coordinates and current beam position, then displays this distance information to the operator. This feedback loop enables continuous monitoring and judgment of whether the distance remains within tolerable range, even after camera adjustment
Solution Approach 2:
The patent performs preliminary detection and storage of the swing axis position coordinates before any camera adjustment takes place. This preliminary action captures the swing axis information that would otherwise be lost, enabling subsequent measurement and judgment of distances without requiring mechanical camera adjustments
3Manufacturing precision
If the sample is swung to and fro during ion beam illumination to reduce topography, then the milling quality is improved, but the milling position may deviate from the field of view making it impossible to judge milling completion timing
Solution Approach 1:
The patent creates a virtual model of the milling position relationship by storing the swing axis position and calculating its correspondence to the camera field of view. This virtual copy allows the system to determine whether the milling position remains within the observable field of view during sample swinging, preventing loss of milling position information
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach ensures that the milling position remains within the field of view, enabling precise control over the milling process and preventing deviations, thus facilitating accurate adjustment and operation of the sample milling apparatus.
Implementation Method 1
an ion source for emitting an ion beam at a sample such that a trace of the impinging ion beam is left on the sample
Data Source
Figure 1~2
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AI summary
There is provided a method of adjusting a sample milling apparatus in such a way that the position of a swing axis can be easily identified. The sample milling apparatus (100) includes an ion source (10), a swinging mechanism (40) for swinging a sample (S), a positioning camera (50) for bringing a target milling position on the sample into coincidence with the impact point of an ion beam, and a display section (86) for displaying an image captured by the positioning camera (50). The adjustment method starts with observing the trace (T) of the impinging ion beam left on the sample with the positioning camera (50) while the position of the positioning camera is held relative to the swing axis (A) of the swinging mechanism (40) and capturing an observation image (12). Then, a display image (14) to be displayed on the display section (86) is extracted from the observation image (12) based on the position of the trace (T), thus bringing the beam impact point and the position of the field of view of the display image into coincidence.