Sample Observation Device Inclined Axis Scanning
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Solution Overview
Problem
Conventional sample observation devices require time-consuming scanning and image acquisition processes to obtain three-dimensional information, especially when the observation area is larger than the imaging area, due to the need for repeated selection of fault planes and movement of stages in different directions.
Innovation Solution
A sample observation device that emits planar light and includes a scanning unit, an imaging optical system with an inclined observation axis, and an image acquiring unit to sequentially acquire partial image data of fault planes, allowing simultaneous scanning and image acquisition without the need for selecting a field of view, thereby improving throughput.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If planar light is emitted onto the whole surface of a focused face and images of multiple fault planes are acquired by scanning the sample in the observation axial direction, then three-dimensional information of the sample can be acquired, but the observation time becomes excessively long due to repeated scanning, stopping, and stage movements
Solution Approach 1:
The patent changes the observation dimension by inclining the observation axis at an angle θ (10°≤θ<90°) relative to the emission face normal, rather than observing orthogonally. This dimensional change allows the observation optical system to capture fault plane images during continuous sample scanning without requiring repeated stopping and stage movements, thereby reducing observation time while still acquiring three-dimensional information
Solution Approach 2:
The patent enables continuous scanning of the sample in the observation axial direction without repeated stopping and stage movements. The inclined observation axis allows the imaging optical system to continuously capture fault plane images throughout the scanning process, eliminating idle time and making the useful action (image acquisition) continuous rather than intermittent
2Area of stationary object
If the observation area is larger than the imaging area, then more comprehensive sample coverage is achieved, but additional operations of moving the stage in directions different from the observation axial direction and selecting imaging fields of view are necessary, increasing complexity and time
Solution Approach 1:
By inclining the observation axis, the patent creates a geometric relationship where continuous scanning in the observation axial direction naturally provides comprehensive sample coverage. The inclined angle θ allows the observation optical system to capture a broader effective area during a single continuous scan, eliminating the need for additional stage movements in directions different from the observation axial direction and reducing field selection operations
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach significantly reduces the time required to acquire observation image data by enabling simultaneous scanning and image acquisition, eliminating the need for repeated stage movements and field selection, thus enhancing the efficiency of data acquisition and analysis.
Implementation Method 1
an emission optical system for emitting planar light onto a sample
Implementation Method 2
an imaging optical system having an observation axis inclined with respect to the emission face and for forming an image from observation light generated in the sample
Data Source
Figure 1
Figure 2
Figure 3(A)~3(D)
AI summary
A sample observation device (1) includes: an emission optical system (3) for emitting planar light (L2) onto a sample (S); a scanning unit (4) for scanning the sample (S) with respect to an emission face (R) of the planar light (L2); an imaging optical system (5) having an observation axis (P2) inclined with respect to the emission face (R) and for forming an image from observation light (L3) generated in the sample (S) in accordance with the emission of the planar light (L2); an image acquiring unit (6) for acquiring a plurality of partial image data corresponding to a part of an optical image according to the observation light (L3) formed as an image by the imaging optical system (5); and an image generating unit (8) for generating observation image data of the sample S based on the plurality of partial image data generated by the image acquiring unit (6).