Automatic Sample Preparation with Image-Guided Piece Transfer
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Solution Overview
Problem
Existing automatic sample preparation apparatuses lack the capability to accurately process and automate the transfer of miniaturized sample pieces into uniform shapes, particularly when using ion beams for sample preparation, leading to inefficiencies in positional accuracy and automation of sampling operations.
Innovation Solution
An automatic sample preparation apparatus is developed, incorporating a charged particle beam irradiation system, a sample stage, a sample piece transfer device, a gas supply portion, and a computer that controls these components to automate the extraction and transfer of sample pieces using image-based positional information and template-matching techniques, ensuring precise placement on a sample piece holder.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Extent of automation
If manual operation is used to extract and transfer sample pieces, then flexibility in handling is maintained, but automation capability is lost and productivity is reduced
Solution Approach 1:
The system uses image recognition and template matching algorithms to automatically identify sample piece positions and transfer locations, enabling the apparatus to perform sampling operations autonomously without manual intervention while maintaining adaptability through software-based position adjustment
Solution Approach 2:
Manual mechanical operations for sample piece extraction and transfer are replaced with an automated transfer device controlled by a computer system that uses image processing to determine positions, substituting human-operated mechanical systems with automated electromechanical systems
2Manufacturing precision
If traditional methods are used for processing multiple sample pieces, then existing equipment can be utilized, but positional accuracy deteriorates due to miniaturization of sample pieces
Solution Approach 1:
An image recognition system serves as an intermediary between the transfer device and the sample pieces, capturing optical images of sample pieces and transfer locations, processing them through template matching algorithms, and converting visual information into precise positional coordinates for automated transfer
Solution Approach 2:
The system transitions from direct mechanical positioning to optical field-based positioning by capturing two-dimensional images of sample pieces and transfer locations, then using image processing algorithms to extract three-dimensional spatial relationships and transfer coordinates
3Productivity
If automated transfer device is introduced, then productivity is improved, but device complexity increases
Solution Approach 1:
The transfer device is designed with multi-functionality, capable of performing both sample piece extraction and transfer operations, while the computer system integrates image acquisition, image processing, position calculation, and device control functions into a single unified system
Solution Approach 2:
The system combines the image acquisition device, image processing unit, position calculation unit, and transfer device control into an integrated automated sampling system, merging multiple separate functions into a coordinated unified system that operates through centralized computer control
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The apparatus effectively automates the operation of extracting and transferring sample pieces formed by ion beam processing, achieving accurate and reliable transfer of samples to predetermined positions, enhancing positional accuracy and automation in sample preparation.
Implementation Method 1
a charged particle beam irradiation optical system which performs irradiation with a charged particle beam
Implementation Method 2
a gas supply portion which irradiates gas forming a deposition film with the charged particle beam
Data Source
AI summary
An automatic sample preparation apparatus that automatically prepares a sample piece from a sample and includes a focused ion beam irradiation optical system, an electron beam irradiation optical system configured to irradiate an electron beam from a direction different from a direction of the focused ion beam, a sample piece transfer device configured to hold and transfer the sample piece separated and extracted from the sample, a detector configured to detect secondary charged particles emitted from an irradiation object, and a computer configured to recognize a position of the sample piece transfer device by image-recognition using an image data of the focused ion beam and the electron beam generated by irradiating the sample piece transfer device with the focused ion beam and the electron beam, and drive the sample piece transfer device, wherein the image data includes a reference mark.