Sample Transport Mechanism Integrated into Drive Unit
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Solution Overview
Problem
The installation of a sample transporting mechanism in a charged particle beam apparatus restricts the space for other process units in the sample chamber, limiting the expansion of functions and process efficiency.
Innovation Solution
A sample transporting mechanism is integrated with a transportation path parallel to the rotational axis of the sample stage drive unit, allowing the sample to be transported without occupying space in the sample chamber, thus enabling the coexistence of multiple process units.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If a sample transporting mechanism is installed in the sample chamber, then the sample can be transported from the auxiliary sample chamber to the sample stage, but the space for installing other process units is restricted
Solution Approach 1:
The sample transporting mechanism is extracted from the sample chamber and integrated into the sample stage drive unit. The transportation path is formed within the drive unit structure, allowing sample transport functionality to be separated from the sample chamber interior space, thus eliminating the space restriction conflict.
Solution Approach 2:
The sample stage drive unit is given multiple functions: it not only rotates the sample stage for positioning but also houses the transportation path for moving samples from the auxiliary sample chamber. This multi-functionality eliminates the need for separate dedicated transport mechanisms within the chamber.
2Productivity
If more process units are installed in the sample chamber, then the functions and process efficiency are enhanced, but the space for sample transporting mechanism is reduced
Solution Approach 1:
By extracting the transportation function from the sample chamber space and integrating it into the drive unit, the patent frees up chamber volume for additional process units while maintaining complete sample transport capability, thus resolving the space conflict.
Solution Approach 2:
The transportation path is arranged in the radial direction (parallel to rotational axis) within the drive unit structure, utilizing the dimensional space of the drive unit rather than competing for the three-dimensional chamber volume, allowing both transport and additional process units to coexist.
Data Source
AI summary
A charged particle beam apparatus includes: a sample chamber; a sample stage; an electron beam irradiation system for irradiating the sample with an electron beam; a focused ion beam irradiation system for irradiating the sample with a focused ion beam; a sample stage drive unit having a rotational axis orthogonal to at least one of an irradiation axis of the electron beam irradiation system and an irradiation axis of the focused ion beam irradiation system; and a sample transporting mechanism for transporting the sample to the sample stage. The sample transporting mechanism includes a transportation path provided in the sample stage drive unit in a direction parallel to the rotational axis of the sample stage drive unit, and is configured to transport the sample to the sample stage through the transportation path.