Surface Acoustic Wave Sensor With Multi-Resonance Measurement

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Solution Overview

Problem

Conventional surface acoustic wave-based material measurement sensors are limited by single resonance frequency, leading to restricted measurement of inherent physical properties and reduced sensing reliability due to temperature and humidity sensitivity, especially with water-containing particles.

Innovation Solution

A particle material measuring device with multiple pairs of comb-shaped electrodes and temperature control units (heating and cooling) to generate surface acoustic waves with multiple resonance frequencies, allowing precise measurement of physical properties like size, mass, and shape, while maintaining consistent temperature and moisture-free conditions.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If a conventional material measurement sensor uses only one resonance frequency, then the device structure remains simple, but the measurement of inherent physical properties of materials is limited

Engineering Contradiction:
Improvemeasurement capabilityVSAvoiddevice structure
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The sensor is divided into multiple electrode modules (first electrode module, second electrode module, third electrode module, etc.), where each module contains comb electrodes with different gap widths. This segmentation allows each module to generate surface acoustic waves at different resonance frequencies, enabling multi-frequency measurement capability while maintaining a modular and manageable device structure

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The sensor structure is designed to perform multiple functions simultaneously: it can measure different inherent physical properties of materials (density, stiffness, elasticity, viscosity) at different resonance frequencies using the same piezoelectric substrate and electrode configuration, making the device universally applicable for comprehensive material characterization

Inventive Principle:
Principle #6Universality (Multi-functionality)

2Measurement precision

If temperature changes occur in the measurement environment, then the physical property values of chemical materials change, but measurement reliability is degraded

Engineering Contradiction:
Improvemeasurement accuracyVSAvoidsensing reliability
Core Design Contradiction:
Measurement precisionVSReliability

Solution Approach 1:

The sensor utilizes changes in resonance frequencies at different temperatures to compensate for temperature effects. By measuring at multiple resonance frequencies and analyzing the frequency shifts, the system can distinguish between temperature-induced frequency changes and those caused by material property changes, thereby maintaining measurement accuracy across varying temperatures

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The system employs feedback mechanisms where the measured frequency data from multiple electrode modules is processed to detect temperature variations. This information is then used to compensate for temperature effects on material measurements, ensuring reliable sensing results even in temperature-varying environments

Inventive Principle:
Principle #23Feedback

3Measurement precision

If particles containing water contact the piezoelectric substrate surface, then surface acoustic wave attenuation occurs, but sensing reliability decreases

Engineering Contradiction:
Improvesensing precisionVSAvoidsensing reliability
Core Design Contradiction:
Measurement precisionVSReliability

Solution Approach 1:

The sensor uses surface acoustic waves (mechanical vibrations) that propagate along the piezoelectric substrate surface. By operating at multiple resonance frequencies, the system can detect material properties through vibrational characteristics while being less susceptible to attenuation from water-containing particles, as different frequencies interact differently with the particles

Inventive Principle:
Principle #18Mechanical vibration

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Accurate and reliable measurement of various physical properties by generating multi-resonant waves, enhancing sensing reliability and precision, especially for temperature-dependent materials.

Implementation Method 1

the piezoelectric substrate is formed of a piezoelectric material that is excited by the first to n-th electrode modules to generate a surface acoustic wave

Methodology Applied
Scientific EffectPiezoelectric effect: Piezoelectric Effect

Implementation Method 2

generate a surface acoustic wave (where n is a natural number greater than 1)

Methodology Applied
Scientific EffectSurface acoustic wave: Surface Acoustic Wave

Implementation Method 3

when an AC signal is applied to a pair of crossed comb-shaped electrodes, an electric field is formed by a piezoelectric material between another pair of comb-shaped electrodes

Methodology Applied
Scientific EffectElectric field: Electric Field

Data Source

PatentUS12584885B2Material measuring device, material measuring system and material measuring method
Publication Date: 2026.03.24 DAEGU GYEONGBUK INSTITUTE OF SCIENCE AND TECHNOLOGY
  • US12584885B2 patent drawing
  • US12584885B2 patent drawing
  • US12584885B2 patent drawing

AI summary

The present invention relates to a surface acoustic wave-based material measuring device, material measuring system, and material measuring method, and more particularly, to a technique of accurately and reliably measuring various inherent physical properties of temperature and frequency-dependent materials by generating multiple resonant waves.