Layered SAW Substrate Grain Control for Crack Resistance

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Solution Overview

Problem

The production of SAW devices often results in cracks in ceramic substrates, leading to decreased yield due to insufficient strength under thermal stress during the heat cycle process.

Innovation Solution

A ceramic substrate with a mean grain size of 0.5 μm to 15 μm and a standard deviation of grain sizes less than 1.5 times the mean, bonded to a piezoelectric substrate through Van der Waals force, to enhance strength and prevent crack formation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Strength

If a ceramic substrate with conventional grain size is used, then the production cost is reduced, but cracks form during the heat cycle process due to insufficient strength

Engineering Contradiction:
Improvestrength of ceramic substrateVSAvoidproduction process stability
Core Design Contradiction:
StrengthVSEase of manufacture

Solution Approach 1:

The patent applies parameter changes by precisely controlling the grain size of the ceramic substrate within the range of 0.5 μm to 15 μm. This specific grain size parameter range optimizes the balance between strength and manufacturability, preventing crack formation during heat cycle processes while maintaining production feasibility. The controlled grain size transforms the ceramic substrate's mechanical properties to resist thermal stress without compromising ease of manufacture.

Inventive Principle:
Principle #35Parameter changes

2Temperature

If single-crystalline sapphire substrate is used as base substrate, then heat radiation performance is improved, but production cost increases

Engineering Contradiction:
Improveheat radiation performanceVSAvoidproduction cost
Core Design Contradiction:
TemperatureVSEase of manufacture

Solution Approach 1:

The patent changes the material parameter from single-crystalline sapphire to polycrystalline ceramic with specifically controlled grain size (0.5 μm to 15 μm). This parameter change maintains adequate heat radiation performance while dramatically reducing production cost, as polycrystalline ceramic is more economically manufacturable than single-crystalline sapphire.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent employs composite material strategy by using polycrystalline ceramic with optimized grain size distribution as the base substrate. This composite approach combines the benefits of cost-effectiveness with sufficient thermal performance, replacing expensive single-crystalline materials while maintaining the required heat radiation capabilities for SAW device operation.

Inventive Principle:
Principle #40Composite materials

3Ease of manufacture

If ceramic substrate with large grain size variation is used, then manufacturing is easier, but crack formation increases due to non-uniform stress distribution

Engineering Contradiction:
Improvemanufacturing flexibilityVSAvoidcrack resistance
Core Design Contradiction:
Ease of manufactureVSReliability

Solution Approach 1:

The patent applies parameter changes by strictly controlling the grain size distribution of the ceramic substrate. By maintaining grain sizes within the 0.5 μm to 15 μm range, the patent achieves uniform stress distribution throughout the substrate during thermal cycling. This controlled parameter range prevents the non-uniform stress concentration that leads to crack formation, thereby improving reliability while preserving manufacturing ease.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The described ceramic substrate effectively suppresses crack formation during the production process of SAW devices, ensuring higher yield and reliability by controlling grain size distribution and residual stress within specific ranges.

Implementation Method 1

a piezoelectric substrate and the ceramic substrate are bonded to each other through Van der Waals force

Methodology Applied
Scientific EffectVan der Waals force: Van der Waals Force

Data Source

PatentUS11750171B2Layered body, and saw device
Publication Date: 2023.09.05 SUMITOMO ELECTRIC INDUSTRIES LTD
  • US11750171B2 patent drawing
  • US11750171B2 patent drawing
  • US11750171B2 patent drawing

AI summary

A ceramic substrate is formed of polycrystalline ceramic and has a supporting main surface. At the supporting main surface of the ceramic substrate, the mean of grain sizes of the polycrystalline ceramic is 0.5 μm or more and less than 15 μm and the standard deviation of the grain sizes is less than 1.5 times the mean.