ScAlN Target Manufacturing via Alloy Nitridization
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Solution Overview
Problem
The existing method of producing scandium aluminum nitride (ScAlN) target bodies for pulsed laser deposition (PLD) using a mixture of scandium nitride and aluminum nitride powders results in low density, inhomogeneous mixtures, and inefficient laser absorption due to differences in particle size and thermal expansion, leading to local stresses, cracks, and unwanted droplet formation during prolonged use.
Innovation Solution
A method involving the conversion of a scandium aluminum alloy body into scandium aluminum nitride particles through nitridization, followed by hot pressing to form a high-density, single-phase ScAlN target body using an isostatic hot press at elevated temperatures and pressures, ensuring uniform density and efficient laser absorption.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a mixture of scandium nitride and aluminum nitride powders is used to compose the target body, then the film formed on substrate will be ScAlN, but the target body has low density and shows difference in optical absorption due to particle size differences
Solution Approach 1:
The patent merges scandium and aluminum metals first to form a homogeneous ScAl alloy, then converts it to ScAlN through nitridization. This single-phase approach eliminates the particle size differences and density issues present in mixed powder approaches, while maintaining the desired ScAlN film composition.
Solution Approach 2:
The patent changes the chemical composition parameter from a mixture of two separate compounds (ScN and AlN) to a single compound phase (ScAlN) derived from an alloy. This parameter change resolves the optical absorption differences and density issues by creating a uniform material structure.
2Quantity of substance
If a mixture of scandium nitride and aluminum nitride powders is compressed at high pressure, then the target body density may improve, but local stresses and cracks occur due to difference in particle size and thermal expansion
Solution Approach 1:
The patent creates a homogeneous ScAl alloy before nitridization, ensuring uniform particle size and thermal expansion properties throughout the material. This homogeneity prevents local stresses and cracks during high-pressure compression, while still achieving high target body density.
3Productivity
If a target body composed of two different materials (scandium nitride and aluminum nitride) is used, then the film can be deposited, but laser absorption is inefficient and droplets are ejected during prolonged use
Solution Approach 1:
The patent changes the material from a heterogeneous mixture of ScN and AlN to a homogeneous single-phase ScAlN material. This parameter change creates uniform optical properties and laser absorption characteristics, improving both deposition efficiency and stability during prolonged use by eliminating the droplet ejection issue.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The resulting ScAlN target body achieves high density and homogeneous particle distribution, enabling efficient UV laser absorption and prolonged use in PLD processes without droplet formation, resulting in improved film deposition quality.
Implementation Method 1
pulverizing the scandium aluminum alloy body into scandium aluminum particles
Implementation Method 2
nitridizing the scandium aluminum particles into scandium aluminum nitride particles
Implementation Method 3
the nitridizing of the scandium aluminum particles comprises the step of feeding the scandium aluminum particles in a gas stream of nitrogen or ammonia (NH3), while maintaining a temperature of the gas and scandium aluminum particles mixture of over 500° C.
Implementation Method 4
hot pressing the scandium aluminum nitride particles into a scandium aluminum nitride target body
Implementation Method 5
the scandium aluminum nitride particles are hot pressed in an isostatic hot press
Implementation Method 6
irradiating a target material with a laser beam. Due to the high energy of the laser beam a plasma will be generated from the target material
Implementation Method 7
PLD a film can be arranged on a substrate by irradiating a target material with a laser beam
Data Source
AI summary
The invention relates to a method for producing a scandium aluminum nitride (ScAlN) target body for pulsed laser deposition (PLD), which includes the steps of: providing a scandium aluminum alloy body; pulverizing the scandium aluminum alloy body into scandium aluminum particles; nitridizing the scandium aluminum particles into scandium aluminum nitride particles; and hot pressing the scandium aluminum nitride particles into a scandium aluminum nitride target body.