Ion Implanter Scan Head Micro-Tilt Mechanism
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Solution Overview
Problem
Conventional scan arms for ion implanters require high energy and slow response times for tilting the scan head, and are limited to tilting in only two directions, making precise alignment of the ion beam difficult, especially at small angles.
Innovation Solution
A scan head with a micro-tilt mechanism that includes a frame assembly, lead screws, motors, gear racks, and a control gear, allowing for precise tilting of the work piece in any orientation by using a combination of rotational and tilting movements, reducing energy consumption and improving response speed.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If the rotation driver rotates the entire scan head to tilt the work piece, then the work piece can be tilted in a plane, but the energy consumption increases and the response time becomes slower
Solution Approach 1:
The scan head is divided into two independent tilting mechanisms: a coarse tilting mechanism (first tilting mechanism) for large-angle adjustments and a fine tilting mechanism (second tilting mechanism) for small-angle precision adjustments. This segmentation allows each mechanism to operate independently, reducing the energy required for each tilting operation while maintaining full tilting capability.
Solution Approach 2:
The patent implements a dynamic tilting system where the scan head can switch between different tilting modes based on the required adjustment. The first tilting mechanism handles coarse adjustments when large angle changes are needed, while the second tilting mechanism takes over for fine-tuning, creating a dynamic response that optimizes energy consumption based on the specific operational requirements.
2Ease of operation
If the rotation driver rotates the entire scan head, then the work piece can be tilted, but the response time becomes slower
Solution Approach 1:
The scan head is divided into two independent tilting mechanisms: a coarse tilting mechanism (first tilting mechanism) for large-angle adjustments and a fine tilting mechanism (second tilting mechanism) for small-angle precision adjustments. This segmentation allows each mechanism to operate independently, reducing the energy required for each tilting operation while maintaining full tilting capability.
Solution Approach 2:
The patent implements a dynamic tilting system where the scan head can switch between different tilting modes based on the required adjustment. The first tilting mechanism handles coarse adjustments when large angle changes are needed, while the second tilting mechanism takes over for fine-tuning, creating a dynamic response that optimizes energy consumption based on the specific operational requirements.
3Adaptability or versatility
If the rotation driver is used for tilting, then the work piece can be tilted in a plane, but it cannot tilt in any direction or achieve precise alignment at small angles
Solution Approach 1:
The scan head is divided into two independent tilting mechanisms: a coarse tilting mechanism (first tilting mechanism) for large-angle adjustments and a fine tilting mechanism (second tilting mechanism) for small-angle precision adjustments. This segmentation allows each mechanism to operate independently, reducing the energy required for each tilting operation while maintaining full tilting capability.
Solution Approach 2:
The patent introduces a second tilting mechanism that operates in a different dimensional space from the first mechanism. The first mechanism provides coarse tilting in one plane, while the second mechanism adds fine-adjustment capability in the same plane, effectively creating a two-dimensional control space for tilting that enables both multi-directional tilting and high-precision alignment.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables precise alignment of the ion beam in any direction with reduced energy consumption and faster response times, allowing for precise control of the work piece's tilt angle, enhancing the ion implantation process.
Implementation Method 1
an electrostatic chuck (ESC) of the scan arm to move during an ion implantation process
Implementation Method 2
a pair of lead screws, a pair of first motors, a pair of gear racks
Data Source
AI summary
A scan head assembled to a scan arm for an ion implanter and a scan arm using the same are provided, wherein the scan head is capable of micro tilting a work piece and comprises a case, a shaft assembly, an electrostatic chuck, a first driving mechanism and a micro-tilt mechanism. The shaft assembly passes through a first side of the case and has a twist axis. The electrostatic chuck is fastened on a first end of the shaft assembly outside the case for holding the work piece. The first driving mechanism is disposed within the case and capable of driving the shaft assembly and the ESC to rotate about the twist axis. The micro-tilt mechanism is disposed within the case and capable of driving the shaft assembly and the ESC to tilt relative to the case.