Scan Line Contact Layout for Periodic Display Inspection
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Solution Overview
Problem
Existing display devices face inspection errors due to aperiodicity of contact holes, which affect the reliability and accuracy of the manufacturing process.
Innovation Solution
The display device incorporates a recess pattern defined by an insulating layer between intersecting scan lines, ensuring electrical insulation while allowing electrical contact through a scan contact hole, and includes an etch stop pattern to enhance structural integrity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If contact holes are used to connect intersecting scan lines, then electrical connectivity is achieved, but inspection errors occur due to aperiodicity
Solution Approach 1:
The contact hole connection is segmented into two distinct parts: a first contact hole connecting the first scan line, and a second contact hole connecting the second scan line. This segmentation allows each contact hole to be positioned at regular intervals, creating periodicity that eliminates inspection errors while maintaining electrical connectivity for both scan lines.
2Reliability
If scan lines are insulated from each other, then electrical insulation is achieved, but structural complexity increases
Solution Approach 1:
The insulating layer is positioned in the vertical dimension between the first and second scan lines, allowing electrical insulation to be achieved through layer separation rather than adding lateral structural elements. This maintains simplicity in the planar layout while providing effective insulation in the vertical dimension.
3Reliability
If insulating layer is placed between scan lines, then electrical insulation is maintained, but manufacturing precision requirements increase
Solution Approach 1:
The insulating layer serves multiple functions simultaneously: it provides electrical insulation between scan lines, defines the periodic pattern for contact hole placement, and acts as a structural base layer. This multi-functionality reduces the need for additional precision-critical layers and simplifies manufacturing requirements.
Data Source
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AI summary
A display device comprises a first scan line and a second scan line that extend in a first direction, a third scan line extending in a second direction intersecting the first direction, the third scan line intersecting the first scan line and the second scan line, and an insulating layer including a scan contact hole disposed between the first scan line and the third scan line, and a recess pattern disposed between the second scan line and the third scan line. The scan contact hole passes through the insulating layer. The first scan line and the third scan line are in electrical contact with each other by the scan contact hole. The recess pattern includes a shape recessed from an upper surface to a lower surface of the insulating layer. The second scan line and the third scan line are electrically insulated from each other.