Scan Line Contact and Recess Layout for Display Inspection Reliability
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Solution Overview
Problem
Existing display devices face inspection errors due to aperiodicity of contact holes, which affect the electrical connectivity and reliability of scan lines.
Innovation Solution
The display device incorporates a recess pattern and an etch stop pattern to ensure electrical insulation between intersecting scan lines, using an insulating layer with scan contact holes and an oxide semiconductor etch stop pattern to maintain electrical contact while preventing short circuits.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If scan contact holes are used to establish electrical contact between scan lines, then electrical connectivity is improved, but inspection errors occur due to aperiodicity
Solution Approach 1:
The patent divides the insulating layer into multiple segments: a first insulating layer with scan contact holes for electrical connection, and a second insulating layer with recess patterns for insulation. This segmentation allows each layer to perform its specific function without interfering with inspection processes.
Solution Approach 2:
The patent introduces a vertical dimension by creating recess patterns that extend downward from the surface of the second insulating layer. This dimensional change allows the third scan line to be electrically insulated from the second scan line while maintaining proper spacing and preventing short circuits.
2Reliability
If recess patterns are added to ensure electrical insulation, then short circuit prevention is improved, but device complexity increases
Solution Approach 1:
The patent combines the recess pattern formation with the existing insulating layer deposition process. The recess patterns are formed by removing portions of the second insulating layer, which is already part of the standard manufacturing sequence, thereby minimizing additional process steps.
Solution Approach 2:
The second insulating layer acts as an intermediary between the first scan line and the third scan line. By introducing this intermediate layer with recess patterns, the patent provides a clear electrical insulation barrier without requiring direct modification of the conductive scan lines themselves.
3Reliability
If multiple insulating layers with different patterns are used, then electrical insulation is improved, but manufacturing precision requirements increase
Solution Approach 1:
The patent forms the first insulating layer with scan contact holes before depositing the second insulating layer. This preliminary action establishes the electrical connection paths first, allowing the subsequent recess patterns to be formed without compromising the already-established contact holes.
Solution Approach 2:
The patent applies different structural qualities to different regions: the first insulating layer has localized contact holes for electrical connection, while the second insulating layer has recess patterns for insulation. Each region is optimized for its specific function, allowing manufacturing processes to target specific areas with appropriate precision requirements.
Data Source
AI summary
A display device comprises first scan line and a second scan line that extend in a first direction, a third scan line extending in a second direction intersecting the first direction, the third scan line intersecting the first scan line and the second scan line, and an insulating layer including a scan contact hole disposed between the first scan line and the third scan line, and a recess pattern disposed between the second scan line and the third scan line. The scan contact hole passes through the insulating layer in. The first scan line and the third scan line are in electrical contact with each other by the scan contact hole. The recess pattern includes a shape recessed from an upper surface to a lower surface of the insulating layer. The second scan line and the third scan line are electrically insulated from each other.