Compact Scanned Electron-Beam X-Ray Source Design

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Solution Overview

Problem

Conventional scanned electron-beam x-ray sources require large vacuum chambers due to the need for significant deflection angles, leading to increased costs, complexity, and reduced reliability, as well as stringent voltage regulation for accurate beam positioning.

Innovation Solution

A compact scanned electron-beam x-ray source design where the electron beam is propagated parallel to the target and scanned using a moving magnetic cross-field, reducing the size of the vacuum chamber by translating the deflection point along the target length, employing a series of magnets or a sliding permanent magnet to control the beam's trajectory.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a conventional scanned electron-beam x-ray source uses a large vacuum chamber to accommodate significant deflection angles, then the electron beam can be deflected across the target, but the device size, cost, and complexity increase

Engineering Contradiction:
ImprovereliabilityVSAvoidvacuum chamber volume
Core Design Contradiction:
ReliabilityVSVolume of stationary object

Solution Approach 1:

The deflection function is segmented from the single large vacuum chamber to multiple smaller vacuum chambers arranged in series. Each chamber contains a portion of the electron beam path and requires only a fraction of the total deflection angle, thereby reducing the volume of each individual vacuum chamber while maintaining the overall scanning capability.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The electron beam path is folded into multiple dimensions by using a series of vacuum chambers arranged in sequence rather than a single linear path. This dimensional reconfiguration allows the beam to achieve the necessary total deflection through multiple smaller angular changes across separate chambers, reducing the footprint of each chamber.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Manufacturing precision

If the maximum deflection angle is limited to avoid magnetic field aberrations, then beam quality is maintained, but the target must be placed at a significant distance from the deflection coil, increasing device size

Engineering Contradiction:
Improvebeam positional accuracyVSAvoiddistance from deflection coil to target
Core Design Contradiction:
Manufacturing precisionVSLength of stationary object

Solution Approach 1:

The total deflection angle is segmented into multiple smaller angular changes across a series of vacuum chambers. Each chamber contributes a portion of the total deflection, allowing the beam to achieve the necessary angular change while maintaining small deflection angles in each individual chamber, thereby reducing the distance required between each chamber and its corresponding target section.

Inventive Principle:
Principle #1Segmentation

3Measurement precision

If the anode voltage is tightly regulated to maintain spot positional accuracy, then beam positioning is precise, but the system complexity and cost increase

Engineering Contradiction:
Improvespot positional accuracyVSAvoidvoltage regulation complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The voltage regulation requirement is segmented across multiple vacuum chambers, where each chamber operates with its own deflection coil and requires only moderate voltage stability. This distributes the positioning control burden across multiple independent units rather than requiring tight regulation of a single high-voltage anode, thereby reducing the overall system complexity.

Inventive Principle:
Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This design significantly reduces the volume and cost of the x-ray source, enhances reliability, and allows for more flexible voltage regulation, enabling efficient scanning with improved positional accuracy and scan rates.

Implementation Method 1

A compact scanned electron-beam x-ray source design where the electron beam is propagated parallel to the target and scanned using a moving magnetic cross-field

Methodology Applied
Scientific EffectLorentz force: Lorentz Force

Implementation Method 2

When high-energy electrons strike a metal of high atomic number, their kinetic energy is converted to x-rays

Methodology Applied
Scientific EffectBremsstrahlung radiation:

Implementation Method 3

employing a series of magnets or a sliding permanent magnet to control the beam's trajectory

Methodology Applied
Scientific EffectMagnetic field: Magnetic Field

Data Source

PatentUS7639785B2Compact scanned electron-beam x-ray source
Publication Date: 2009.12.29 L3 TECHNOLOGIES INC
  • US7639785B2 patent drawing
  • US7639785B2 patent drawing
  • US7639785B2 patent drawing

AI summary

A compact, reliable scanning electron-beam x-ray source achieves reduced complexity and cost. In particular, the x-ray source includes an electron beam that is propagated parallel to an x-ray target and is swept across the target in response to a moving magnetic cross field. Rather than scanning the beam by deflecting it about a single point, the point of deflection is translated along the target length, dramatically reducing the volume of the device. The magnetic cross field is translated along the target length using either mechanical systems to move permanent magnets, or electrical systems to energize an array of electromagnets.