Scanner Device Actuator Holder Segmentation for High-Frequency Scanning
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Solution Overview
Problem
Conventional scanning probe microscopes are limited by low resonance frequencies in the Z-axis direction, leading to reduced scanning speeds due to asymmetric oscillations and mechanical coupling between actuators, which restricts the scanning frequency to below the resonance frequency of other axes.
Innovation Solution
A scanner device with an actuator holder that supports the actuator at multiple holding line parts extending in the scanning direction, minimizing mechanical coupling and allowing the actuator to oscillate closer to free oscillation, thereby increasing the resonance frequency and scanning speed.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If the actuator is fixed at one end to a support part, then the structure is simple and easy to manufacture, but the resonance frequency in the Z direction is significantly decreased to half of the free oscillation frequency
Solution Approach 1:
The support structure is segmented into multiple holding line parts distributed along the actuator length, rather than a single fixed support point. This segmentation allows the actuator to oscillate more freely while still being properly supported, thereby increasing the resonance frequency closer to the free oscillation frequency while maintaining manufacturing simplicity.
2Stability of the object's composition
If the actuator is fixed at one end, then the structure is stable, but asymmetric oscillation generates large impact that excites resonant oscillation in other axes, limiting the scanning frequency
Solution Approach 1:
The holding line parts are positioned asymmetrically or at specific locations along the actuator to balance the oscillation dynamics. This strategic positioning reduces the impact of asymmetric oscillation and minimizes the excitation of resonant oscillations in other axes, enabling higher scanning frequencies while maintaining system stability.
Solution Approach 2:
The actuator is pre-positioned and held at multiple line parts before oscillation begins, establishing a stable baseline configuration. This preliminary arrangement ensures that when oscillation occurs, the impact is distributed and controlled, preventing excessive excitation of other axes and enabling higher scanning frequencies.
3Speed
If the resonance frequency is increased to achieve high-speed scanning, then the scanning speed improves, but mechanical coupling between actuators causes oscillation transmission that limits the usable frequency
Solution Approach 1:
The harmful mechanical coupling between actuators is extracted and eliminated by using multiple distributed holding line parts instead of a single fixed support. This configuration isolates the actuator oscillation, preventing the transmission of oscillations to other axes and enabling high-speed scanning without the reliability issues caused by oscillation transmission.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enables higher frequency and speed scanning by reducing oscillation impact and maintaining resonance frequency close to that of free oscillation, significantly improving the scanning performance of scanning probe microscopes.
Implementation Method 1
Each actuator comprises a piezoelectric body (piezo element)
Data Source
AI summary
A scanner device is provided which enables high-frequency scanning and can increase the speed of a scanning probe microscope. A scanner device (1) used for a scanning probe microscope includes a Z actuator (7) which scans an object to be scanned in a scanning direction, and a Z actuator holder (11) which holds the Z actuator (7). The Z actuator holder (11) holds the Z actuator (7) at a plurality of holding line parts which extend in the scanning direction and are separated from each other. For example, the Z actuator (7) has a rectangular cross-section, and the four edges of the Z actuator (7) are held by the Z actuator holder (11). The Z actuator (7) is pressed into a holding hole (29) of the Z actuator holder (11).