3D Scanner Mounting State Verification for Plasma Processors
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Solution Overview
Problem
In semiconductor manufacturing, maintenance of plasma processing apparatuses often results in size errors and mounting deviations of components, leading to variations in processing results, which can delay the return to normal processing mode and reduce throughput due to the need for repeated disassembly and reassembly to ensure tolerance ranges are met.
Innovation Solution
A mounting state informing apparatus using a 3D scanner to acquire data on the position and direction of components, comparing this data to stored reference information, and outputting results to determine if components are within tolerance ranges, allowing for early detection and correction of mounting errors without performing actual processing.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If components are reassembled after maintenance without verification, then assembly speed is improved, but mounting precision deteriorates due to size errors and mounting deviations
Solution Approach 1:
The system performs preliminary measurement and verification of component mounting positions using a 3D scanner before actual processing begins. By detecting mounting deviations in advance and providing feedback for correction, the system ensures mounting precision is maintained without requiring slow manual verification during assembly, thus resolving the contradiction between assembly speed and mounting precision.
2Manufacturing precision
If repeated disassembly and reassembly is performed to ensure tolerance ranges, then mounting precision is improved, but productivity deteriorates due to time loss
Solution Approach 1:
The system implements a feedback mechanism where the 3D scanner measures component positions, the controller compares measurements against tolerance ranges, and correction information is provided back to the assembly process. This automated feedback loop ensures mounting precision is achieved in the first assembly attempt without requiring repeated disassembly and reassembly, thereby maintaining high productivity while ensuring tolerance compliance.
3Manufacturing precision
If manual verification of mounting positions is performed, then mounting precision is improved, but time consumption increases
Solution Approach 1:
The system replaces manual mechanical verification methods with an automated optical measurement system (3D scanner) and computer-controlled verification process. The scanner rapidly captures component positions and the controller automatically compares them against tolerance specifications, providing precise mounting verification without the time consumption of manual measurement and calculation, thus resolving the contradiction between mounting precision and verification time.
Data Source
AI summary
A mounting state informing apparatus includes a database, an acquisition unit, a first specifying unit, a comparison unit and an output unit. The database stores information upon a mounting position and a direction of each of multiple components belonging to a processing apparatus. The acquisition unit acquires first appearance data, which is obtained by a 3D scanner, indicating a state of an appearance of the processing apparatus. The first specifying unit identifies the multiple components based on the first appearance data and specifies a mounting position and a direction of each of the identified components. The comparison unit compares the specified mounting position and the specified direction of each of the identified components with the information upon the mounting position and the direction stored in the database. The output unit is configured to output a comparison result obtained by the comparison unit.