Scanning Mechanism for High-Speed AFM and Optical Microscopy

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Current atomic force microscopes (AFMs) face challenges in achieving high-speed scanning of biological samples while simultaneously observing with an inverted optical microscope, due to constraints on sample or substrate positioning and the need for flexible cantilevers with high resonance frequencies, which are difficult to integrate with existing scanning mechanisms.

Innovation Solution

A scanning mechanism comprising a cantilever, XY and Z actuators, and a light condensing portion, where the Z actuator and light condensing portion are arranged side by side, allowing for high-speed scanning in the X and Y directions with reduced vibration noise, enabling simultaneous high-speed AFM and optical microscope observation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Speed

If a conventional scanning mechanism is used to scan the cantilever in the X, Y, and Z directions, then the AFM can observe biological samples, but the scanning speed is limited and cannot achieve high-speed imaging within 0.1 sec

Engineering Contradiction:
Improvescanning speedVSAvoidimage capture rate
Core Design Contradiction:
SpeedVSProductivity

Solution Approach 1:

The patent inverts the conventional scanning approach by making the sample move relative to the cantilever instead of moving the cantilever over the sample. The sample is mounted on a piezoelectric element that can rapidly position it in the X and Y directions, while the cantilever remains relatively stationary or moves only in the Z direction for height control. This inversion enables much faster scanning speeds because the sample can be repositioned more quickly than the cantilever can be scanned across the sample surface.

Inventive Principle:
Principle #13The other way round (Inversion)

Solution Approach 2:

The patent segments the scanning functions into two independent systems: a fast sample positioning system using piezoelectric elements for X-Y scanning, and a slow cantilever control system for Z-axis height control. This segmentation allows each subsystem to be optimized independently, with the sample positioning system achieving high-speed operation while the cantilever maintains precise control for imaging.

Inventive Principle:
Principle #1Segmentation

2Ease of operation

If the AFM is combined with an inverted optical microscope for simultaneous observation, then positioning and finding of samples is improved, but the mechanical constraints on sample or substrate positioning limit the scanning flexibility

Engineering Contradiction:
Improvesample positioningVSAvoidscanning flexibility
Core Design Contradiction:
Ease of operationVSAdaptability or versatility

Solution Approach 1:

By inverting the scanning mechanism so that the sample moves rather than the cantilever, the patent resolves the conflict between optical microscope integration and scanning flexibility. The sample can be precisely positioned using the piezoelectric element while maintaining full scanning flexibility across the sample surface, allowing simultaneous optical and AFM observation without mechanical constraints.

Inventive Principle:
Principle #13The other way round (Inversion)

3Speed

If a flexible cantilever with high resonance frequency is used to increase scanning speed, then the observation speed improves, but the integration with existing scanning mechanisms becomes difficult

Engineering Contradiction:
Improveobservation speedVSAvoidscanning mechanism integration
Core Design Contradiction:
SpeedVSDevice complexity

Solution Approach 1:

The patent eliminates the need for complex integration of high-frequency cantilevers with conventional scanning mechanisms by inverting the approach. Instead of making the cantilever move at high speeds, the sample is rapidly repositioned using piezoelectric elements. This allows the use of flexible, high-resonance-frequency cantilevers without the complexity of integrating them with high-speed scanning mechanisms, as the cantilever itself does not need to move rapidly.

Inventive Principle:
Principle #13The other way round (Inversion)

4Ease of manufacture

If the Z actuator and light condensing portion are arranged separately, then the structural design is simplified, but vibration noise increases and observation precision deteriorates

Engineering Contradiction:
Improvestructural designVSAvoidobservation precision
Core Design Contradiction:
Ease of manufactureVSMeasurement precision

Solution Approach 1:

The patent merges the Z actuator and light condensing portion into a single integrated unit. The light condensing portion is positioned within or adjacent to the Z actuator structure, allowing both functions to be performed from the same location. This integration reduces the number of separate components and simplifies the overall structure while simultaneously reducing vibration noise and improving observation precision by eliminating relative motion between the light condensing portion and the sample.

Inventive Principle:
Principle #5Merging (Combining)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration allows for high-speed, high-precision scanning of biological samples, reducing vibration noise and improving observation resolution, enabling faster image capture and enhanced precision in biological sample observation.

Implementation Method 1

an optical lever type optical displacement sensor applies a beam having a diameter of several μm to several ten μm to a cantilever. A change in the reflection direction of the reflected beam depending on the warp of the lever is detected by a two-segments detector or the like.

Methodology Applied
Scientific EffectOptical detection: Reflection

Data Source

PatentUS9170272B2Scanning mechanism and scanning probe microscope
Publication Date: 2015.10.27 OHBA YUSUKE
  • US9170272B2 patent drawing
  • US9170272B2 patent drawing
  • US9170272B2 patent drawing

AI summary

A scanning mechanism includes a cantilever, an XY movable portion movable in X and Y directions parallel to an X-Y plane, an XY actuator to scan the XY movable portion in the X and Y directions, a Z actuator to scan the cantilever in a Z direction perpendicular to the X-Y plane, and a light condensing portion to cause light for detecting a displacement of the cantilever to enter the cantilever. The Z actuator and the light condensing portion are held by the XY movable portion and arranged side by side in projection to the X-Y plane.