Scanning Microscope Image Correction via Dynamic Sampling

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Solution Overview

Problem

Conventional scanning technologies face challenges in accurately assigning image pixels to desired sampling locations due to deviations caused by thermal or non-systematic factors, leading to image distortions and artifacts.

Innovation Solution

A method and apparatus that utilize a periodic scanning movement, sampled at different frequencies, to calculate and predict future changes in amplitude, phase, and frequency, allowing for dynamic adaptation and accurate assignment of sampling values to a grid, thereby compensating for thermal and temporal changes without requiring precise scanner control.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If conventional scanning control is used to correct sampling positions, then image quality can be maintained, but the system cannot react to thermal or non-systematic deviations

Engineering Contradiction:
Improvereactability to deviationsVSAvoidcontrol system complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent implements feedback by continuously monitoring the actual scanning trajectory via position signals and comparing it with the intended trajectory. The system uses this feedback to dynamically adjust the sampling timing and assignment of detection signals to image pixels, thereby compensating for thermal and non-systematic deviations without requiring complex real-time control mechanisms.

Inventive Principle:
Principle #23Feedback

Solution Approach 2:

The patent replaces complex mechanical control systems with a computational approach. Instead of using sophisticated hardware control mechanisms to prevent deviations, the system uses software-based correction algorithms that process position signals and dynamically adjust sampling parameters, substituting mechanical complexity with computational intelligence.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

2Measurement precision

If precise scanner control is implemented to assign pixels to sampling locations, then image accuracy improves, but device complexity increases

Engineering Contradiction:
Improvepixel assignment accuracyVSAvoidscanner control precision
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The system uses the scanner's own position signals, which are inherently generated during scanning, to determine the actual scanning trajectory. This self-service approach eliminates the need for external precision control systems, as the scanner's own operational data is utilized to correct for deviations and maintain accurate pixel assignment.

Inventive Principle:
Principle #25Self-service

Solution Approach 2:

The patent dynamically changes sampling parameters such as sampling timing and frequency based on the actual scanning trajectory. By adjusting these parameters in real-time according to the measured position deviations, the system maintains high measurement precision without requiring complex hardware control mechanisms.

Inventive Principle:
Principle #35Parameter changes

3Measurement precision

If sampling frequency is increased to capture thermal changes, then response accuracy improves, but data processing load increases

Engineering Contradiction:
Improvethermal change detection accuracyVSAvoiddata processing throughput
Core Design Contradiction:
Measurement precisionVSProductivity

Solution Approach 1:

The patent performs preliminary analysis of position signals to identify and compensate for thermal drift and systematic errors before they affect the final image data. By proactively correcting these deviations using the position information, the system reduces the need for high sampling frequencies and minimizes data processing requirements while maintaining measurement precision.

Inventive Principle:
Principle #10Preliminary action

Data Source

PatentUS12007544B2Method and apparatus for capturing an image of an object using a scanning microscope
Publication Date: 2024.06.11 CARL ZEISS MICROSCOPY GMBH
  • US12007544B2 patent drawing
  • US12007544B2 patent drawing
  • US12007544B2 patent drawing

AI summary

A method for capturing an image of an object includes guiding a scanning beam along a scanning trajectory over the object using a scanner, with the scanning movement being periodic in a direction. The scanning movement is sampled at a first sampling frequency for detecting and capturing a current position of the scanner as position values and radiation from the object is captured as captured sampling values at a second sampling frequency. Current values of the amplitude and the phase of the scanning movement are calculated. A current amplitude, phase and/or frequency and future changes in the amplitude, phase and/or frequency over time are calculated. An image grid is set, with grid elements being assigned the sampling values based on times at which the scanning beam crosses or will cross at least one boundary of the grid elements.