Scanning Microscopy Resolution via Overlapping PSF Source Separation

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Current scanning-type microscopes face limitations in achieving high imaging resolution due to the inherent characteristics of Point Spread Functions (PSFs) used in radiation interaction with specimens, which restricts the ability to obtain detailed, super-resolution images.

Innovation Solution

The method involves employing multiple beam configurations with different Point Spread Functions in overlapping zones to apply distinct regions of the PSF to the specimen during probing sessions, utilizing Source Separation algorithms for image reconstruction, thereby enhancing spatial resolution beyond conventional techniques.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If a single beam configuration with a fixed Point Spread Function is used in scanning microscopy, then the imaging process is simple and fast, but the spatial resolution is limited by the inherent characteristics of the PSF

Engineering Contradiction:
Improvespatial resolutionVSAvoidimaging process complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The imaging process is segmented into multiple probing sessions, each using a different beam configuration with a distinct PSF. The overall image is reconstructed by combining information from these segmented measurements, allowing super-resolution beyond what a single PSF can achieve

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The solution moves from a single-dimensional imaging approach (one beam configuration) to a multi-dimensional approach by varying beam configurations across different dimensions (angle, energy, focus), thereby extracting more information from overlapping PSFs to achieve enhanced resolution

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Measurement precision

If multiple beam configurations with overlapping PSFs are used to achieve super-resolution, then spatial resolution is improved, but the amount of data and processing complexity increases

Engineering Contradiction:
Improvespatial resolutionVSAvoiddata processing difficulty
Core Design Contradiction:
Measurement precisionVSDifficulty of detecting and measuring

Solution Approach 1:

A computational intermediary (reconstruction algorithm) is introduced to process the data from multiple probing sessions. This intermediary performs source separation and image reconstruction, transforming the complex multi-PSF data into a high-resolution image while managing the processing complexity systematically

Inventive Principle:
Principle #24Intermediary (Mediator)

3Reliability

If multiple probing sessions with different beam configurations are performed, then signal-to-noise ratio is improved through overlap zone analysis, but the acquisition time increases

Engineering Contradiction:
Improvesignal-to-noise ratioVSAvoidacquisition time
Core Design Contradiction:
ReliabilityVSLoss of time

Solution Approach 1:

The method performs probing sessions with partially overlapping PSFs, focusing measurements strategically in overlap zones where multiple PSFs contribute. This partial action approach improves signal-to-noise ratio in critical regions without requiring complete redundancy across the entire field of view, thereby reducing total acquisition time

Inventive Principle:
Principle #16Partial or excessive action

Data Source

PatentEP2963673B1Computational scanning microscopy with improved resolution
Publication Date: 2019.11.13 FEI CO
  • EP2963673B1 patent drawingFigure 1A
  • EP2963673B1 patent drawingFigure 1B
  • EP2963673B1 patent drawingFigure 1C

AI summary

A method of accumulating an image of a specimen using a scanning-type microscope, comprising the following steps: - Directing a beam of radiation from a source through an illuminator so as to irradiate a surface S of the specimen; - Using a detector to detect a flux of radiation emanating from the specimen in response to said irradiation; - Causing said beam to follow a scan path relative to said surface; - For each of a set of sample points in said scan path, recording an output Dn of the detector as a function of a value Pn of a selected measurement parameter P, thus compiling a measurement set M = {(Dn, Pn)}, where n is a member of an integer sequence; - Using computer processing apparatus to automatically deconvolve the measurement set M and spatially resolve it so as to produce reconstructed imagery of the specimen, wherein, considered at a given point pi within the specimen, the method comprises the following steps: - In a first probing session, employing a first beam configuration B1 to irradiate the point pi with an associated first Point Spread Function F1, whereby said beam configuration is different to said measurement parameter; - In at least a second probing session, employing a second beam configuration B2 to irradiate the point pi with an associated second Point Spread Function F2, whereby: ▪ F2 overlaps partially with F1 in a common overlap zone Oi in which point pi is located; ▪ F1 and F2 have respective non-overlapping zones F1' and F2' outside of Oi, - Using a Source Separation algorithm in said computer processing apparatus to perform image reconstruction in said overlap zone Oi considered separately from said non-overlapping zones F1' and F2'.