Scanning Mirror Amplitude Measurement Test Bench
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Solution Overview
Problem
Current scanning mirror-based photoelectric vertical measurement systems lack a method to independently and accurately assess the performance of scanning mirrors before they are used, leading to potential inefficiencies and resource wastage during system testing.
Innovation Solution
A device and method that includes a light source, diaphragm, scanning mirror retainer, photoelectric sensor with multiple sensing elements, and a signal acquisition and processing unit to measure the amplitude of a scanning mirror by analyzing the vibration frequency and light intensities reflected by the scanning mirror.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a scanning mirror-based photoelectric vertical measurement system is used, then the wafer surface level can be accurately determined, but the scanning mirror performance cannot be independently assessed before system integration
Solution Approach 1:
The patent extracts the scanning mirror from the complex photoelectric vertical measurement system and creates a standalone test bench. By separating the scanning mirror assessment from the full system integration, the invention enables independent performance evaluation of the scanning mirror using a simplified optical path with a light source, beam splitter, position-sensitive detector, and signal processing unit.
Solution Approach 2:
The patent introduces a beam splitter as an intermediary component in the test bench. The beam splitter divides the light from the light source into two paths: one reflecting off the scanning mirror to the position-sensitive detector for amplitude measurement, and another serving as a reference path. This intermediary enables independent characterization of the scanning mirror's vibration amplitude without requiring the complete measurement system.
2Reliability
If the scanning mirror is tested only during system integration, then system-level performance can be verified, but time and resources are wasted when the mirror is problematic
Solution Approach 1:
The patent implements preliminary testing of the scanning mirror through a dedicated test bench before the scanning mirror is integrated into the full photoelectric vertical measurement system. The test bench performs preliminary characterization of the scanning mirror's vibration amplitude and frequency response, allowing potential issues to be identified and resolved before system integration, thereby preventing wasted time and resources during system-level testing.
3Ease of manufacture
If the scanning mirror performance is assessed in combination with other system components, then system integration is simplified, but independent characterization of the scanning mirror is not possible
Solution Approach 1:
The patent segments the evaluation process into two independent parts: (1) a standalone test bench for characterizing the scanning mirror's vibration amplitude and frequency response, and (2) the full photoelectric vertical measurement system for wafer surface measurement. This segmentation allows the scanning mirror to be independently characterized and selected based on performance specifications before integration, providing versatility in mirror selection while maintaining simplified system integration through standardized interfaces.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables the characterization and determination of a scanning mirror's performance before use, ensuring it functions as desired and reducing labor, resource, and time wastage during system testing.
Implementation Method 1
a light source for outputting an optical signal
Implementation Method 2
the scanning mirror, after being retained, being able to periodically reflect the optical signal
Implementation Method 3
a photoelectric sensor disposed lateral to the scanning mirror, the photoelectric sensor including three or more sensing elements and configured to detect and collect the optical signal reflected by the scanning mirror
Data Source
AI summary
A device and method for measuring amplitude of a scanning mirror are disclosed. The device includes a light source (20) for outputting an optical signal; a diaphragm (21) for modifying size and shape of a light spot of the optical signal output by the light source (20); a scanning mirror retainer for placing a scanning mirror (22) to be measured, the scanning mirror, after being retained, being able to periodically reflect the optical signal; a photoelectric sensor (23) including three or more sensing elements and configured to detect and collect the optical signal reflected by the scanning mirror (22); and a signal acquisition and processing unit (24) for processing a signal collected by the photoelectric sensor (23) to derive an amplitude of the scanning mirror (22). Therefore, it is possible to characterize the scanning mirror (22) before the scanning mirror (22) is used, determining performance of the scanning mirror (22).