Scanning Mirror With High Specific Rigidity Base
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Solution Overview
Problem
Conventional scanning mirrors experience flexure during high-speed operation, leading to reduced focusing characteristics and increased moment of inertia, which limits the effective reflection range and energy density of laser beams, making it difficult to achieve precise and wide-range processing.
Innovation Solution
A scanning mirror with a mirror base formed from a non-metallic material having a specific rigidity of at least 100 GPa·cm3/g, such as diamond or silicon carbide, is used to suppress flexure and enhance focusing characteristics, allowing for high-speed operation without reducing the beam diameter or effective reflection range.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Speed
If the effective reflection range of the scanning mirror is reduced to reduce the moment of inertia, then the scanning mirror can be driven at high speed, but the beam diameter must be reduced and the numerical aperture is lowered
Solution Approach 1:
The patent changes the material parameter of the mirror base from conventional quartz glass to a material with high specific rigidity (at least 100 GPa·cm³/g), enabling the mirror base to maintain structural integrity at high speeds without reducing the effective reflection range
Solution Approach 2:
The patent uses a composite structure consisting of a mirror base made from high-specific-rigidity material and a reflective film formed on its surface, combining the advantages of high rigidity and optical reflectivity
2Ease of manufacture
If quartz glass is used as the mirror base material, then the manufacturing is conventional, but flexure is generated during high-speed driving leading to lowered focusing characteristic
Solution Approach 1:
The patent changes the material parameter from quartz glass to a material with high specific rigidity (at least 100 GPa·cm³/g), which suppresses flexure during high-speed driving and maintains focusing characteristics
Solution Approach 2:
The patent maintains the mirror base in a substantially flat state during high-speed operation by using high-specific-rigidity material, preventing the curvature changes that would degrade focusing performance
3Speed
If the beam diameter is reduced to enable high-speed scanning, then the moment of inertia is reduced, but the energy density cannot be enhanced and the processing range is limited
Solution Approach 1:
The patent changes the material parameter of the mirror base to high-specific-rigidity material, enabling maintenance of a large beam diameter during high-speed scanning, which preserves energy density and expands processing range
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enables enhanced focusing characteristics, increased energy density, and wider-range processing capabilities while maintaining a large beam diameter, offering greater design flexibility and cost-effectiveness for light-guiding optical elements.
Implementation Method 1
the mirror base is formed from a non-metallic material having a specific rigidity, determined by Young's modulus and density, of at least 100 GPa·cm3/g
Implementation Method 2
a reflective film which is formed on the mirror base
Data Source
AI summary
A scanning mirror includes a mirror base and a reflective film formed on the mirror base. The mirror base is formed from a non-metallic material having a specific rigidity, determined by Young's modulus (GPa) and density (g/cm3), of at least 100 GPa·cm3/g.