Scanning Plate Anti-Reflection Layer Segmentation

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Solution Overview

Problem

Existing scanning plates for optical position measuring devices face challenges in effectively suppressing disruptive reflections, which can falsify position measurements, and current anti-reflection coatings require complex processing steps.

Innovation Solution

A scanning plate with a substrate featuring a thin anti-reflection layer of low absorption coefficient materials like silicon or germanium, applied using thin-film technology, is designed such that the layer is only present on the grating bars and not in the gaps, reducing disruptive back reflections without adding complexity to the etching process for grating production.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Object-affected harmful factors

If an anti-reflection layer is applied to the entire surface of the scanning plate, then disruptive reflections are suppressed, but the production process becomes more complex

Engineering Contradiction:
Improvedisruptive reflectionsVSAvoidproduction process complexity
Core Design Contradiction:
Object-affected harmful factorsVSDevice complexity

Solution Approach 1:

The anti-reflection layer is segmented to be applied only on specific functional areas (grating bars and windows) rather than the entire surface. This is achieved by applying the layer to a master pattern and transferring it selectively, avoiding the need for complex masking processes while reducing disruptive reflections in critical areas.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The anti-reflection coating is applied locally only where needed - on the grating bars and window areas - rather than uniformly across the entire scanning plate surface. This localized application suppresses disruptive reflections in functional areas while simplifying the overall production process by avoiding unnecessary coating in non-functional areas.

Inventive Principle:
Principle #3Local quality

2Object-affected harmful factors

If the anti-reflection layer is continuous across the grating area, then reflections are suppressed, but diffraction efficiency decreases

Engineering Contradiction:
Improveback reflectionsVSAvoiddiffraction efficiency
Core Design Contradiction:
Object-affected harmful factorsVSManufacturing precision

Solution Approach 1:

The anti-reflection layer is segmented into discrete regions corresponding to grating bars and windows, with gaps between them. This segmentation allows the layer to suppress reflections on the grating bars while leaving the gaps open to maintain proper light diffraction patterns, thus preserving diffraction efficiency.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The anti-reflection coating is applied with local quality - present on grating bars where reflection suppression is needed, and absent from gaps where diffraction functionality is critical. This selective application optimizes both reflection suppression and diffraction efficiency.

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration significantly reduces unwanted reflections in the grating areas while maintaining high diffraction efficiency and simplifying the production process, ensuring accurate position measurements and improved signal quality.

Implementation Method 1

The surface has an anti-reflection layer that is interrupted in the area of the gaps. The anti-reflection layer comprises a layer of a material with a low absorption coefficient and high real refractive index (at a wavelength of approx. 1 μm), such as silicon or germanium

Methodology Applied
Scientific EffectAnti-reflection: Anti-Reflective Coating

Implementation Method 2

The anti-reflection layer comprises a layer of a material with a low absorption coefficient and high real refractive index (at a wavelength of approx. 1 μm)

Methodology Applied
Scientific EffectRefraction: Refraction

Implementation Method 3

the surface has at least one region with a grid formed from gaps and webs, the gaps being formed in the substrate

Methodology Applied
Scientific EffectDiffraction: Diffraction

Implementation Method 4

Gratings are arranged both on the scale and on the scanning plate, which split the light into different orders of diffraction or combine it again and cause it to interfere

Methodology Applied
Scientific EffectDiffraction grating: Diffraction Grating

Implementation Method 5

the light from a light source in the scanning head is guided through a scanning plate onto a scale

Methodology Applied
Scientific EffectLight transmission: Light

Implementation Method 6

reflected from there back to the scanning head and detected in one or more detectors

Methodology Applied
Scientific EffectPhotoelectric detection: Photoelectric Effect

Data Source

PatentEP3438618B1Scanner disk for an optical position measuring device
Publication Date: 2021.08.18 DR JOHANNES HEIDENHAIN GMBH
  • EP3438618B1 patent drawingFigure 1~2
  • EP3438618B1 patent drawingFigure 3

AI summary

A scanning plate for an optical position measuring device is disclosed, comprising a substrate (SUB) with a transmission-operated surface (O) having various functional areas (G, F, R). The surface (O) has at least one area with a grid (G) formed from gaps (L) and ribs (S), wherein the gaps (L) are formed in the substrate (SUB). The surface (O) has an antireflective coating (AR) which is interrupted in the area of ​​the gaps (L).