Scanning Probe Micro-Tip Corrosion Control

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Solution Overview

Problem

Traditional optical microscopy is ineffective for analysis and characterization at the nanoscale, atomic scale, or molecular scale, particularly under quantum effects, as it struggles to provide high-resolution and high-stability measurements.

Innovation Solution

A scanning probe with a micro-tip featuring a concavely curved lateral surface, manufactured using a method involving a corrosive solution and precise corrosion control, allowing for the formation of a micro-tip with a tiny apex and specific shape configurations for enhanced interaction with specimens.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If traditional optical microscopy is used for specimen analysis, then the measurement process is simple and easy to operate, but the resolution and measurement precision are insufficient at nanoscale, atomic scale, or molecular scale

Engineering Contradiction:
Improvemeasurement precisionVSAvoiddevice complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The probe is segmented into distinct functional regions: a base portion and a micro-tip portion with different geometries. The micro-tip has a concavely curved lateral surface that concentrates interaction at the apex, while the base provides structural support. This segmentation allows the system to achieve nanoscale resolution through the specialized micro-tip geometry without requiring complete redesign of the entire measurement system.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The invention transitions from traditional optical measurement dimensions to nanoscale physical interaction dimensions. By creating a micro-tip with a concavely curved surface and apex diameter of 1-5 nm, the system operates in a different dimensional regime where physical proximity and surface curvature enable quantum-scale interactions with the specimen, achieving resolution beyond the diffraction limit of optical microscopy.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Manufacturing precision

If a scanning probe with micro-tip is used to achieve high-resolution nanoscale measurement, then the measurement precision and stability are improved, but the manufacturing difficulty and process complexity increase

Engineering Contradiction:
Improvemicro-tip shape precisionVSAvoidease of manufacture
Core Design Contradiction:
Manufacturing precisionVSEase of manufacture

Solution Approach 1:

The invention converts the naturally occurring concave meniscus shape formed by liquid surface tension into a beneficial feature. By immersing the probe precursor in a corrosive solution and controlling the corrosion process, the liquid interface naturally creates a concavely curved lateral surface on the micro-tip. This converts what would normally be a surface tension effect into a precise geometric feature with apex diameter of 1-5 nm, achieving high manufacturing precision through a self-organizing natural process rather than complex machining.

Inventive Principle:
Principle #22Blessing in disguise (Convert harm into benefit)

Solution Approach 2:

The manufacturing process controls the micro-tip geometry by changing parameters of the corrosion process: immersion depth, corrosive solution concentration, temperature, and corrosion time. By adjusting these parameters, the concavely curved lateral surface and apex dimensions (1-5 nm diameter) are precisely controlled. The parameter changes in the corrosion process naturally produce the desired complex geometry without requiring complex manufacturing equipment.

Inventive Principle:
Principle #35Parameter changes

3Measurement precision

If the micro-tip apex diameter is reduced to 1-5 nm for high-resolution interaction, then the analysis and characterization capability at atomic scale is improved, but the manufacturing precision and control difficulty increase

Engineering Contradiction:
Improveanalysis and characterization capabilityVSAvoidapex diameter control
Core Design Contradiction:
Measurement precisionVSManufacturing precision

Solution Approach 1:

The micro-tip apex geometry is formed through a self-organizing corrosion process rather than precision machining. The corrosive solution naturally etches the probe precursor material, and the concavely curved lateral surface forms spontaneously due to surface tension effects at the liquid interface. This self-service mechanism naturally produces apex diameters of 1-5 nm with high precision, as the process is governed by fundamental physical laws (surface tension, diffusion) rather than mechanical constraints, achieving atomic-scale precision through self-organization.

Inventive Principle:
Principle #25Self-service

Solution Approach 2:

The corrosion process incorporates feedback control through monitoring of corrosion current or impedance changes. As the micro-tip apex forms and reaches the desired 1-5 nm diameter, the electrical properties of the probe change, providing real-time feedback to control the corrosion process. This feedback mechanism ensures precise apex dimension control by automatically adjusting the corrosion rate, converting a potentially uncontrolled process into a precisely regulated manufacturing step.

Inventive Principle:
Principle #23Feedback

4Ease of manufacture

If a corrosive solution method is used to form the micro-tip with concavely curved lateral surface, then the manufacturing simplicity and cost are improved, but the process control and safety requirements increase

Engineering Contradiction:
Improvemanufacturing simplicityVSAvoidprocess control complexity
Core Design Contradiction:
Ease of manufactureVSDevice complexity

Solution Approach 1:

The invention replaces complex mechanical machining or lithographic systems with a chemical corrosion process. Instead of using precision machines to carve the micro-tip geometry, a corrosive solution chemically etches the probe precursor material. This substitution simplifies the manufacturing equipment requirements while achieving the same geometric precision, as chemical processes can naturally form complex curved surfaces more easily than mechanical processes. The concavely curved lateral surface forms through chemical diffusion and surface tension rather than mechanical removal.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables high-resolution analysis and characterization by forming a scanning probe with a micro-tip that can accurately interact with specimens at the nanoscale, improving measurement precision and stability in microscopy systems.

Implementation Method 1

providing a probe precursor and a corrosive solution, the corrosive solution is capable of corroding the probe precursor

Methodology Applied
Scientific EffectCorrosion: Crevice Corrosion

Data Source

PatentUS11579169B2Scanning probe having micro-tip, method and apparatus for manufacturing the same
Publication Date: 2023.02.14 NATIONAL INSTITUTE OF METROLOGY CHINA
  • US11579169B2 patent drawing
  • US11579169B2 patent drawing
  • US11579169B2 patent drawing

AI summary

The present disclosure provides a scanning probe, a method and an apparatus for manufacturing the scanning probe. The scanning probe includes a base and a micro-tip disposed on an end of the base, wherein at least a section of the micro-tip comprises a lateral surface with a concavely curved generatrix. In the method, an end of a probe precursor is immersed in a corrosive solution by having a length direction of the probe precursor inclined with a liquid surface of the corrosive solution. The probe precursor is corroded by the corrosive solution while a corrosion current of the corroding is monitored. The probe precursor is moved away from the corrosive solution after a magnitude of the corrosion current has a plunge. The apparatus includes a container containing the corrosive solution, and a driving device configured to move the probe precursor in the container through a fastener.